Gigaphoton Inc.

Norio Iwai

Osamu Wakabayashi

Yukio Watanabe

Miwa Igarashi

Kouji Ashikawa

An apparatus for generating extreme ultraviolet light may include a reference member, a chamber fixed to the reference member, the chamber including at least one window, a laser beam introduction optical system configured to introduce an externally supplied laser beam into the chamber through the at least one window, and a positioning mechanism configured to position the laser beam introduction optical system to the reference member.

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Tochigi, Japan

Norio Iwai