Screen Holdings Co., Ltd.

Norimasa Matsui

Takashi Kawamura

Yoshio Ito

Tamio Fukui

Takashi Kuroda

Kazutaka Ikeuchi

An ink-jet printer includes: a base material transport mechanism for transporting a base material along a transport path in a transport direction; an ink ejection head having a lower surface opposed to the transport path, and an ink ejection port for ejecting ink toward the transport path; and a base plate having a lower surface opposed to the transport path over the transport path, and a mounting hole open in the lower surface, the ink ejection head being mounted in the mounting hole. The base plate includes an air flow hole that is a though hole penetrating through the base plate. The air flow hole has an air outlet open in a location downstream of the ink ejection port in the lower surface. Air passing through the air flow hole is ejected from the air outlet toward the transport path.

Ink-jet printer and ink-jet printing method

A continuous lighting lamp irradiates a semiconductor wafer held by a quartz susceptor with light from below to perform preliminary heating, and then irradiation of a flash of light is performed by a flash lamp from above. A light absorption ring is provided so as to be close to a peripheral portion of the semiconductor wafer held by the susceptor. The light absorption ring absorbs infrared light and transmits visible light through itself. During preliminary heating, the light absorption ring absorbs light emitted from the continuous lighting lamp to be increased in temperature so that heat radiated from the peripheral portion of the wafer is compensated to cause in-plane temperature distribution of the semiconductor wafer to be uniform. Meanwhile, the flash of light is transmitted through the light absorption ring, so that the light absorption ring is prevented from being damaged by the irradiation of the flash of light.

Growing community of inventors

Kyoto, Japan

Norimasa Matsui