Omron Healthcare Company Ltd.

Noriko Shigihara

Toshihiko Ogura

Masayuki Wakamiya

Yuki Kato

A pressure pulse wave sensor includes: a sensor chip including: a pressure-sensitive element row configured by a plurality of pressure-sensitive elements arranged in one direction; and a chip-side terminal portion placed in an end portion in the one direction of a pressure-sensitive surface on which the pressure-sensitive element row is formed, and electrically connected to the pressure-sensitive element row; and a substrate including a concave portion, the sensor chip fixed to a bottom surface of the concave portion, a substrate-side terminal portion for being electrically connected to the chip-side terminal portion is disposed on a surface of the substrate in which the concave portion is formed, and the pressure pulse wave sensor further includes: an electroconductive member connecting the chip-side terminal portion and the substrate-side terminal portion to each other; and a protective member covering the electroconductive member.

Pressure pulse wave sensor and biological information measurement device

A method for inspecting a pressure pulse wave sensor is provided. The sensor chip includes a recess which is recessed in a direction perpendicular to the pressure-sensitive face, and the pressure-sensitive element array is formed in a portion of the sensor chip whose thickness is reduced in the direction due to the recess. The method includes: bonding and fixing the sensor chip onto the substrate so that the recess communicates with atmospheric air through only the through hole of the substrate; connecting a substrate-side terminal portion of the substrate and the chip-side terminal portion through an electrically conductive member; and performing characteristic evaluation on the sensor chip based on a signal outputted from the substrate-side terminal portion in a state in which air is sucked through the through hole of the substrate to thereby apply negative pressure to the pressure-sensitive face.

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Kyoto, Japan

Noriko Shigihara