Eudyna Devices Inc.

Fujitsu Quantum Devices Limited

Norikazu Iwagami

Hajime Matsuda

Masaomi Emori

Tomohiro Kagiyama

Yasuhiro Tosaka

A semiconductor device includes an operating layer made of a semiconductor and a silicon nitride film formed on the operating layer with the use of a mixed gas that includes mono-silane gas, hydrogen gas, and nitrogen gas, by a plasma CVD apparatus, under a condition that a flow rate of the hydrogen gas is 0.2 percent to 5 percent to an overall flow rate.

Capacitive element fabrication method

A semiconductor device includes a lower pad layer, an insulating layer and an upper pad layer. The lower pad layer is provided on a semiconductor substrate. The insulating layer is away from a surrounding of the lower pad layer so that a space having a recess on a surface between the lower pad layer and the insulating layer is formed. The upper pad layer covers over the lower pad layer and the space, extends to an upper face of the insulating layer, and has an area larger than that of the lower pad layer.

Semiconductor device, electronic device and fabrication method of the same

A manufacturing method of an electronic device includes applying a direct voltage having a first polarity to a capacitor that has an insulating layer including nitrogen and silicon as a capacitor dielectric layer, testing the capacitor to which the direct voltage having the first polarity is applied and determining a nondefective capacitor and a defective capacitor, and applying a direct voltage having a second polarity to the nondefective capacitor. The second polarity is opposite to the first polarity.

Manufacturing method and controlling method of electronic device

A microstrip line includes a first conductor pattern formed on a substrate, a second conductor pattern formed on the first conductor pattern with a width substantially identical with a width of the first conductor pattern, and a third conductor pattern formed on the second conductor pattern with a width smaller than the width of the second conductor pattern.

Growing community of inventors

Yamanashi, Japan

Norikazu Iwagami