Mitsubishi Kasei Corporation

Nippon Pillar Packing Co., Ltd.

Rion Company Ltd.

Mitsubishi Chemical Engineering Corporation

Mitsubishi Kasei Engineering Company

Norihiro Takasaki

Toshiyuki Fukumoto

Kaoru Kondo

Masumi Hino

Toshiharu Ikuta

Kazuhisa Isayama

Yoshifumi Bandou

Kenyou Miyata

Naoki Tsuda

Masafumi Nakamura

Eiji Kariya

Apparatus for producing a polishing solution composed of pure water and abrasive grains, the apparatus including a preparation tank to prepare a polishing solution containing abrasive grains at a predetermined concentration, by mixing an abrasive grain-containing slurry and pure water, and a circulation device for circulating the thus prepared polishing solution to keep the solution in a suspended state. The circulation device includes a circulation conduit and a flow-controllable bypass conduit fluidly associated with the circulation conduit providing a constant flow rate and having a light-extinction type particle detector for monitoring the polishing solution so as to detect large abrasive grains having a particle size not less than a predetermined value and measure the number of the large abrasive grains.

Apparatus for producing polishing solution and apparatus for feeding the same

The present invention relates to a method for diluting an acid or alkaline stock solution with pure water to prepare a mixed solution of an aimed concentration, which method comprises:

Method for diluting acid or alkaline stock solution and apparatus

A coupling device intended to prevent impurities such as dust and particles adhering to the end face of a solution supplying male pipe 2 from being mixed with a high purity chemical solution N, which will be supplied through the device, not to degrade the purity of the solution. It includes a check valve 7 arranged in that end portion of a solution passage 5 in the male pipe 2 which is inserted into a cleaning chamber 15, a valve pusher 44a arranged in that end portion of a solution passage 43 in a solution supplied female pipe 3 which is connected to the passage 5 in the male pipe 2 to push the check valve 7 to open the passage 5, a valve system for opening and closing the passage 43 when the female pipe 3 is reciprocated in the axial direction, and a check valve 51 located on the outlet side of a cleaning liquid passage 48.

Coupling device

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Kitakyushu, Japan

Norihiro Takasaki