Hamamatsu-photonics K.k.

Norihiro Fukuchi

Takashi Inoue

Naoya Matsumoto

Yasunori Igasaki

Haruyasu Ito

Yuu Takiguchi

Tsutomu Hara

Taro Ando

Yoshiyuki Ohtake

Yuji Kobayashi

Naohisa Mukozaka

Tamiki Takemori

Haruyoshi Toyoda

Junji Okuma

Munenori Takumi

Yasushi Ohbayashi

Hiroshi Tanaka

Teruo Hiruma

Mitsuhiro Nagao

A laser processing device configured to emit laser light on an object to perform laser processing of the object, the laser processing device including: a laser output unit configured to output the laser light; a spatial light modulator configured to reflect the laser light output from the laser output unit while modulating the laser light in accordance with a phase pattern; and an objective lens configured to converge the laser light from the spatial light modulator toward the object, in which the spatial light modulator includes an entrance surface, a reflective surface, and a modulation layer configured to display the phase pattern to modulate the laser light, and a dielectric multilayer film having a high reflectance region in a plurality of wavelength bands non-contiguous with each other is formed on the reflective surface.

Laser processing device

In an apparatus for modulating light, a spatial light modulator includes a plurality of pixels and configured to modulate input light in response to a drive voltage for each of the pixels. An input value setting unit is configured to set an input value for the each of pixels. The input value is a digital value, an entire gray level of the digital value is 'N', and 'N' is a natural number. A converting unit is configured to convert the input value to a control value. A control value is a digital value, an entire gray level of the control value is &#x201c;M&#x201d;, and &#x201c;M&#x201d; is a natural number greater than &#x201c;N&#x201d;. A driving unit is configured to convert the control value to a voltage value and drive the each of the pixels in response to the drive voltage corresponding to the voltage value.

Apparatus having spatial light modulator and converting unit converting input value to control value to control spatial light modulator

In an apparatus for modulating light, an spatial light modulator includes a plurality of pixels and configured to modulate input light in response to a drive voltage for each of the pixels. An input value setting unit is configured to set an input value for the each of pixels. The input value is a digital value, an entire gray level of the digital value is 'N', and 'N' is a natural number. A converting unit is configured to convert the input value to a control value. A control value is a digital value, an entire gray level of the control value is &#x201c;M&#x201d;, and &#x201c;M&#x201d; is a natural number greater than &#x201c;N&#x201d;. A driving unit is configured to convert the control value to a voltage value and drive the each of the pixels in response to the drive voltage corresponding to the voltage value.

The present invention relates to a phase modulating apparatus capable of highly accurately and easily correcting the phase modulation characteristic of a reflective electric address spatial light modulator even when a condition of input light is changed. In the LCOS phase modulating apparatus, an input unit inputs the condition of the input light, and a processing unit sets an input value for each pixel. A correction value deriving unit determines a correction condition according to the condition of the input light. A control input value converting unit converts the input value set for each pixel into a corrected input value based on the correction condition. An LUT processing unit converts the corrected input value into a voltage value, and drives each pixel by using a drive voltage equivalent to the converted voltage value.

Phase modulating apparatus and phase modulating method

A laser machining device is provided with a laser light source, a spatial light modulator, a driving unit, a control unit, and a condensing optical system. The control unit selects a basic hologram corresponding to each basic machining pattern included in a whole machining pattern in a workpiece from a plurality of basic holograms stored by the storage unit, and determines a display region of the basic hologram in the spatial light modulator so that the deviation of the value of 'I&#x3b7;/n' becomes small for the selected respective basic hologram when the intensity of a laser beam input to a display region of the basic hologram in the spatial light modulator is defined as I, the diffraction efficiency of the laser beam in the basic hologram is defined as &#x3b7;, and the number of condensing points in a basic machining pattern corresponding to the basic hologram is defined as n.

Laser machining device and laser machining method

A laser processing apparatus including a laser light source, a phase modulation type spatial light modulator, a driving unit, a control unit, and an imaging optical system. A storage unit that is included in the driving unit stores a plurality of basic holograms corresponding to a plurality of basic processing patterns and a focusing hologram corresponding to a Fresnel lens pattern. The control unit arranges in parallel two or more basic holograms selected from the plurality of basic holograms stored in the storage unit, overlaps the focusing hologram with each of the basic holograms arranged in parallel to form the whole hologram, and presents the formed whole hologram to the spatial light modulator.

Laser emitting apparatus using a basic hologram and a focusing hologram

A laser processing device includes a laser light source, a spatial light modulator, a control section, and a condensing optical system. The spatial light modulator, presents a hologram for modulating the phase of the laser light in each of a plurality of two-dimensionally arrayed pixels, and outputs the phase-modulated laser light. The control section causes a part of the phase-modulated laser light (incident light) to be condensed at a condensing position in a processing region as a laser light (contribution light) having a constant energy not less than a predetermined threshold X. The control section causes a laser light (unnecessary light) other than the contribution light condensed to the condensing position existing in the processing region to be dispersed and condensed at a condensing position existing in a non-processing region as a plurality of laser lights (non-contribution lights) having an energy less than the predetermined threshold.

Laser processing device and laser processing method

A phase-modulating apparatus includes a spatial light modulator, an input value setting unit, a plurality of sets of reference data, a converting unit, and a driving unit. The input value setting unit sets an input value for each pixel. Each set of reference data corresponds to at least one pixel. The converting unit converts an input value inputted for each pixel to a control value by referencing the corresponding set of reference data. The driving unit converts the control value to a voltage value. The driving unit drives each pixel with a drive voltage corresponding to the voltage value. Each set of reference data correlates a plurality of first values from which input values are taken, and a plurality of second values from which control values are taken to ensure that the relationship between the plurality of first values and phase modulation amounts attained by the corresponding at least one pixel is a prescribed linear relationship.

Phase-modulating apparatus

A light irradiation device and method for irradiating converged light with an object include a light source configured to output a light, a phase-modulating spatial light modulator, a controller, and a converging optical system. The phase-modulating spatial light modulator is configured to input the light outputted from the light source and to display a hologram modulating a phase of the light at each of a plurality of pixels arranged two-dimensionally, and outputs the phase-modulated light. The controller is configured to cause the spatial light modulator to display a hologram such that the light outputted from the spatial light modulator is converged at a plurality of converging positions. The controller causes the spatial light modulator to display a first hologram and performs a feedback of the first hologram so as to modify the first hologram. The modifying of the first hologram is performed by measuring intensity of the light converged.

Light irradiation device and light irradiation method irradiating converged light with an object

A light source deviceincludes a laser light sourceand an optical phase modulatoror the like. The optical phase modulatorinputs coherent light output from the laser light sourceand transmitted through a beam splitter, phase-modulates the light according to the position on a beam cross section of the light, and outputs the phase-modulated light to the beam splitter. When (p+1) areas sectioned by p circumferences centered on a predetermined position are set on a beam cross section of light input to the optical phase modulator, the more outside each of the (p+1) areas is, the wider the radial width of the area, the amount of phase modulation is constant in each of the (p+1) areas, and the amounts of phase modulation differ by &#x3c0; between two adjacent areas out of the (p+1) areas.

Light source device, observation device, and processing device

The display area selection circuit selects a desired display area. The signal generating circuit sets a period of each shift signal generated while the selection position of the pixel diode is between the shift start position and the display start position shorter than a period of each shift signal generated while the selection position of the pixel diode is between the display start position and the display end position.

LCOS spatial light modulator

A laser processing apparatusincludes a laser light source, a phase modulation type spatial light modulator, a driving unit, a control unit, and an imaging optical system. The imaging optical systemmay be a telecentric optical system. A storage unitA included in the driving unit stores a plurality of basic holograms corresponding to a plurality of basic processing patterns and a focusing hologram corresponding to a Fresnel lens pattern. The control unitarranges in parallel two or more basic holograms selected from the plurality of basic holograms stored in the storage unitA, overlaps the focusing hologram with each of the basic holograms arranged in parallel to form the whole hologram, and presents the formed whole hologram to the spatial light modulator

Laser processing apparatus and laser processing method

A laser machining deviceincludes a laser light source, a spatial light modulator, a controller, a converging optical system, and a shielding member. The phase-modulating spatial light modulatorinputs a laser beam outputted from the laser light source, displays a hologram modulating a phase of the laser beam at each of a plurality of pixels arranged two-dimensionally, and outputs the phase-modulated laser beam. The controllercauses the spatial light modulatorto display a plurality of holograms sequentially, lets the converging optical systemconverge the laser beam outputted from the spatial light modulatorat converging positions having a fixed number of M, selectively places N converging positions out of the M converging positions into a machining region, and machines an object to be machined

Laser machining device with a converged laser beam and laser machining method

A laser light sourceis provided with a first reflection mirror, a laser medium, an aperture, an output mirror, a half mirror, a light beam diameter adjuster, and a second reflection mirror, and outputs laser oscillation lightreflected by the half mirrorto the outside. The main resonator is composed by the first reflection mirrorand the output mirrordisposed so as to be opposed to each other with the laser mediumplaced therebetween. The external resonator is composed by the output mirrorand the second reflection mirrordisposed so as to be opposed to each other. The second reflection mirroris configured such that it gives amplitude or phase variations to respective positions in the section of a light beam when the light is reflected, the second reflection mirror presents an amplitude or phase variation distribution, and determines the transverse mode of the laser oscillation lightbased on the amplitude or phase variation distribution. Thus, a laser light source capable of easily controlling the transverse mode of the laser oscillation light can be realized.

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Hamamatsu, Japan

Norihiro Fukuchi