Micro Precision Co. & Ltd.

Okins Electronics Co., Ltd.

Norihiro Asada

Kenichi Kagawa

The present invention provides an electromagnetically actuating optical deflecting elements which can be manufactured out of reduced number of components and are capable of being actuated at lower frequencies and at wider deflecting angles without causing mechanical influences of the metal wiring on beams of the optical deflecting element. For that purpose, the electromagnetically actuating optical deflecting element comprises: a movable part having a light reflecting plane and a coil; a base component having a magnetic field generating means; and a pair of beams which axially support said movable part on to the base component, The movable part is actuated by an electromagnetic force generated by an electric current flowing through the coil and the magnetic field generating means. The beamsare constituted by one material having functions to perform as conductors for supplying electric current to the coil, to support the movable part, to perform as springs for returning the movable part to a starting position.

Electromagnetically actuated device

In order to provide an anisotropic conductive sheet which can be applied to more finely and more narrowly pitched electrodes and also to provide spring electrodes applied for the anisotropic conductive sheet, the spring electrodes manufactured as follows. A part having a bending leaf spring shape is formed out of a monocrystal silicon by anisotropic etching and gold is plated on the surface of the part so as to obtain a silicon spring electrode. The silicon spring electrodesare inserted in through holes formed on a silicone rubber sheet and fixed to the through holes.

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Kitakatsushika-gun, Japan

Norihiro Asada