Other

Tokyo Electron Limited

Toshiba Ceramics Co., Ltd.

Covalent Materials Corporation

Norihiko Saito

Takanori Saito

Ken Nakao

Tomio Konn

Tomohiro Nagata

Eiichi Toya

Toshiyuki Makiya

Hisaei Osanai

Hiroyuki Honma

Sunao Seko

Hideyuki Yokoyama

Shigeru Yamamura

Kazutoshi Miura

Harunari Hasegawa

George Hoshi

Hiroshi Mori

Akira Otsu

Katsutoshi Ishi

Masakazu Kobayashi

Takeshi Inaba

Masahiko Ichishima

Kazuhiko Shimanuki

Sotaro Takeda

Kouji Teraoka

A decompression apparatus has an exhaust mechanism for decompressing a vacuum chamber. The exhaust mechanism has a main exhaust passage one end of which is connected to the vacuum chamber and the other end of which is connected to a vacuum pump, a first valve disposed in the main exhaust passage; a slow exhaust passage one end of which is connected to the vacuum chamber directly or via part of the main exhaust passage and the other end of which is connected to the vacuum pump directly or via part of the main exhaust passage, a cylindrical inorganic porous body disposed in the slow exhaust passage so that a gap is formed between the inorganic porous body and the inner surface of the slow exhaust passage, and a second valve disposed in the slow exhaust passage.

Decompression apparatus and inorganic porous body

It is provided that a reflection plate of semiconductor heat treatment, which is resistant to cracks or deformations by controlling the adsorption of foreign materials and the production of reaction. Said reflection platefor semiconductor heat treatment is composed of a disk-shaped or ring-shaped plate of optically transmissible material and a plateof inorganic material hermetically enclosed in said disk-shaped or ring-shaped plate, in which said plate of inorganic material has at least one side in contact with said plate of optically transmissible material, said at least one sidehaving a surface roughness of Ra 0.1 to 10.0 &#x3bc;m, said at least one sideformed groovestherein.

Reflection plate for semiconductor heat treatment and manufacturing method thereof

A carbon wire heating element sealing heater is provided. Therein, a carbon wire heating element using carbon fibers is sealed in a quartz glass member, wherein absorption water quantity of the carbon wire heating element is 2&#xd7;10g/cmor less.

Carbon wire heating object sealing heater and fluid heating apparatus using the same heater

A heater sealed with carbon wire heating element has a carbon wire heating element sealed with a quartz glass member, the carbon wire being prepared by knitting carbon single fibers into a knitted cord of a braid, each wire having a crystal structure with a interlayer spacing d (002) thereof being 0.343 or less and crystallite size Lc (002) thereof being 4.0 nm or more.

Heater sealed with carbon wire heating element

A rod-shaped heater provided is composed of a carbon wire heating element sealed in a small or large diameter quartz glass tube, a small diameter quartz glass tube portions and charged with compressed wire carbon members at opposite ends thereof; a sealed terminal section having connection lines and for power supply held between the compressed wire carbon members charged in the small diameter quartz glass tube. The connection lines and the carbon wire heating element are electrically connected by way of the wire carbon members. This rod-shaped heater using the carbon wire heating element is suitable for readily raising the temperature of the agent in the storage tank of the wet etching agent or the grinding agent.

Heater

A sealing terminal includes internal connection lines which are connected to heating elements and external connection lines via which power is supplied. A quartz glass body includes a plurality of grooves in its outer surface to retain the internal and external connection lines in place. Conductive foils are used to connect the internal and external lines which are housed in a quartz glass tube so that the ends of the lines project out of the respective ends thereof. A plug is disposed in the lower end of the tube to close the same. Spark generation is prevented while a low electrical resistance sealed terminal which is simple in structure and quick and easy to assemble, results.

Sealing terminal

A carbon heater comprising heater members (11, 111, 121 . . . 161, 212, 222, 315, 325 . . . 345, 411, 515, 612) in which a plurality of carbon fiber bundles having a plurality of carbon fibers whose diameter is 5 to 15 .mu.m bundled are woven into a longitudinally elongated shape such as a wire shape or a tape shape and the impurity content is less than 10 ppm in ashes.

Carbon heater

Growing community of inventors

Yamagata, Japan

Norihiko Saito