Mitutoyo Corporation

Norihiko Masuda

Koji Kubo

Masashi Ishige

Provided is a chromatic confocal sensor including: a first light source that emits measurement light including a plurality of light beams having different wavelengths; a second light source that emits a visible light beam having a predetermined wavelength; an optical head that causes incident light to be converged at a focal position corresponding to a wavelength of the incident light and outputs reflection light reflected by an object to be measured at the focal position; a position calculation section that calculates a position of the object to be measured on the basis of the reflection light output by the optical head; and a switching section that selectively switches between a first operation in which only the measurement light enters the optical head and a second operation in which at least the visible light beam enters the optical head.

Chromatic confocal sensor and measurement method

A light source apparatus includes a light source, an optical fiber, and a positioning mechanism. The positioning mechanism is configured with a planar position adjustment mechanism, an axial line position adjustment mechanism, and an orientation maintaining mechanism. The planar position adjustment mechanism adjusts a position of the optical fiber in a direction following the light-emitting surface. The axial line position adjustment mechanism adjusts the position of the optical fiber in a direction intersecting with the light-emitting surface. The orientation maintaining mechanism holds the optical fiber in a state where an axis direction of the optical fiber lies in a predetermined intersecting direction with respect to the light-emitting surface.

Growing community of inventors

Kanagawa, Japan

Norihiko Masuda