Hitachi-kokusai Electric Inc.

Norihiko Kataoka

Shinichiro Mori

There is provided a control system of a substrate processing apparatus, comprising: a collecting unit for collecting data from each component that constitutes a substrate processing apparatus, the collecting unit further comprising at least: a buffer for temporarily storing collected data; and a sorting part for rearranging the collected data, based on time data attached to the collected data.

Control system of substrate processing apparatus, collecting unit, substrate processing apparatus and control method of the substrate processing apparatus

Provided is a substrate processing system configured to provide proper data. The substrate processing system comprises a substrate processing apparatus comprising a plurality of components, a controller configured to control the substrate processing apparatus by setting a sequence prescribing time and components, and a collection unit configured to collect data from the components. The collection unit is configured to match data collected from the components via the controller with data collected directly from the components.

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Toyama, Japan

Norihiko Kataoka