Tokyo Electron Limited

Norihide Sagara

Shota Kaneko

Kazuhito Miyazaki

Wataru Yoshitomi

Koutarou Onoue

Shigemi Oono

Fumihiro Miyazaki

A monitoring system is for a sealing apparatus that seals a substrate treatment apparatus by a housing and fills a space sealed by the housing with a predetermined gas atmosphere. The monitoring system includes: a laser sensor for a region, which a person can enter in a space between the housing and the substrate treatment apparatus, as a detection region; and a controller that outputs a control signal to the substrate treatment apparatus or the sealing apparatus based on a detection result by the laser sensor or outputs a notification signal based on the detection result.

Monitoring system for a sealing apparatus having a substrate treatment apparatus in a housing utilizing a laser sensor installed in a space between the housing and the substrate treatment apparatus and that scans a detection region therein

A droplet ejecting apparatus includes a workpiece table configured to place a workpiece thereon, a droplet ejecting head configured to eject droplets onto the workpiece placed on the workpiece table, a Y-axis linear motor configured to move the workpiece table in a main scanning direction (Y-axis direction), a position detector configured to detect a position of a carriage mark, and a control unit configured to calculate the positional deviation amount in the main scanning direction between a detection position detected by the position detector and a reference position of the carriage mark and correct a droplet ejecting timing of the droplet ejecting head based on the positional deviation amount.

Droplet ejecting apparatus having carriage marks, droplet ejecting method, and computer storage medium

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Kumamoto, Japan

Norihide Sagara