Hamamatsu-photonics K.k.

Intel Corporation

Norihide Adachi

Sadaharu Takimoto

Masakuni Kimoto

An actuator device includes a support portion; a first movable portion; a first torsion bar portion coupling the first movable portion to the support portion to be swingable around a first swing axis; and a wiring disposed on the first torsion bar portion. The torsion bar portion is of a meandering shape including a plurality of straight sections extending in a first direction along the first swing axis and juxtaposed in a second direction intersecting with the first direction, and a plurality of turnover sections alternately coupling two ends of the straight sections. The plurality of turnover sections have a curved shape. The wiring includes wiring sections embedded in grooves formed in the turnover sections.

Actuator device and mirror drive device

A mirror drive device is provided as one capable of efficiently gaining a driving force. The mirror drive devicehas a fixed frame; a movable portionsupported so as to be swingable relative to the fixed frame, through torsion barsextending on an identical straight line, and being of a circular shape; a mirrorarranged on a principal surfaceof the movable portion; and a permanent magnetforming a magnetic field around the movable portion; the movable portionhas a drive coilarranged below the mirror; the drive coilis of a 2n-sided polygon shape (where n is an integer of 3 or more) when viewed from a direction orthogonal to the principal surface, at least one side of which is orthogonal to a direction of the magnetic field F.

Mirror drive device

A torsion bar portion is of a meandering shape including a plurality of straight sections and a plurality of turnover sections. The plurality of straight sections extends in a first direction along a swing axis and is juxtaposed in a second direction intersecting with the first direction. The plurality of turnover sections alternately couples two ends of the straight sections. Wiring is disposed on the torsion bar portion. The wiring includes first wiring sections and second wiring sections. The first wiring sections include damascene wiring sections that are disposed so as to be embedded in grooves formed in the turnover sections and that are made of a first metal material including Cu. The second wiring sections are disposed on the straight sections and are made of a second metal material more resistant to plastic deformation than the first metal material.

Growing community of inventors

Hamamatsu, Japan

Norihide Adachi