Seiko Epson Corporation

Norifumi Shimizu

Takayuki Kikuchi

Ryuta Nishizawa

Keiji Nakagawa

Kenji Sato

An electronic device includes: a base; a support unit that includes first and second attaching portions disposed to be separated from each other in a first direction via a middle portion having a conductive pattern formed from a conductive member and is attached to the base in the first and second attaching portions; and a functional element that is supported by the support unit. The conductive pattern includes a broad width portion having a width Win a second direction orthogonal to the first direction and a narrow width portion having a width Wnarrower than the width Win a plan view.

Electronic device, electronic apparatus, and moving object

An angular velocity sensor includes fixing units, a base portion, beam portions that support the base portion with respect to the fixing units, driving vibrating arms connected to the base portion, and detection vibrating arms connected to the base portion. When a width of a detection frequency band is set to f1 [Hz], a resonance frequency in a rotational vibration mode in which the base portion rotates and vibrates around a detection axis with respect to the fixing units in association with the deformation of the beam portions is set to f2 [Hz], and a detuning frequency is set to f3 [Hz], the relation of f1&#x3c;f2&#x3c;f3 is satisfied.

Angular velocity sensor, electronic apparatus, and moving object

A sensor device includes an IC chip, a package which includes a base in which the IC chip is provided and houses the IC chip, the base having a through hole provided in a position that overlaps with the IC chip in the plan view, and a spacer which is provided between the IC chip and the base, and has an aperture communicating the through hole with the space on the opposite side to the base with respect to the IC chip in the package between the IC chip and the space.

Growing community of inventors

Matsumoto, Japan

Norifumi Shimizu