Nec Corporation

Norifumi Sato

Takami Hiruma

Hitoshi Mitani

Hidetaka Natsume

A semiconductor device having a semiconductor substrate, an impurity diffused layer formed in a principal surface of the semiconductor substrate, a conductive member formed on the semiconductor substrate adjacent to the impurity diffused layer and having a sloped surface inclined to the principal surface of the semiconductor substrate, an insulator film deposited to cover the impurity diffused layer and the conductive member, and a common contact hole formed through the insulator film to extend over a surface of the impurity diffused layer and the sloped surface of the conductive member.

Common contact hole structure in semiconductor device

A semiconductor device includes a MOSFET which has a source and drain region of a first conductivity type, and an ion implanted channel section, and a pair of threshold control sections having a second conductivity type, one being disposed in a substrate surface between the channel section and the source region and the other being disposed in the substrate surface between the channel section and the drain region, and each of the threshold control sections having an impurity concentration so high that a threshold voltage of the MOSFET can be controlled. The threshold voltage of the MOSFET is not determined by the impurity concentration in the ion implanted channel section but is determined by the impurity concentration in the threshold voltage control sections. This enables the adequate control of the threshold voltage of the MOSFET that is part of a MOS integrated circuit and the simplification of the manufacturing method of the MOS integrated circuit.

Semiconductor device composed of MOSFET having threshold voltage control

A semiconductor device according to the present invention has misregistration detecting marks provided in the periphery of a semiconductor chip. The misregistration detecting marks consist of a first scale mark for detecting misalignment in a first direction, a second scale mark for detecting misalignment in a second direction perpendicular to the first direction, and a third scale mark for detecting misalignment in a third direction making respectively specified angles with the first direction and the second direction.

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Tokyo, Japan

Norifumi Sato