Osaka University

Mitsubishi Heavy Industries Limited

Institute for Laser Technology

Hamamatsu-photonics K.k.

Panasonic Holdings Corporation

Noriaki Miyanaga

Yasukazu Izawa

Hiroaki Furuse

Junji Kawanaka

Shinya Ishii

Koichi Hamamoto

Katsunobu Nishihara

Kenji Takeshita

Tomoko Saito

Kazuo Imazaki

Taku Saiki

Keiji Nagai

Takayoshi Norimatsu

Hiroaki Nishimura

Hiroyuki Furukawa

Masayuki Fujita

Kenichiro Tanaka

Masahiro Yoshida

Shingo Nishikata

Toshiyuki Kawashima

Takanori Aketa

Hiroyuki Daigo

Tomoya Morioka

Takashi Kurita

Yoshinori Shimada

Masakatsu Murakami

Mitsuo Nakai

Atsushi Sunahara

Tatsuhiko Yamanaka

Masahiro Nakatsuka

Tomoharu Okuno

Takahiro Hibino

Ryouji Matsui

Vasilli Zhakhovski

Shigeaki Uchida

Keisuke Shigemori

Haik Chosrowjan

Shinsuke Fujioka

Qincui Gu

Takahiro Yamada

A phase difference measuring device is provided with a phase conversion device and a detection device. The phase conversion device converts a first laser beam that passes therethrough so that the first laser beam includes a phase distribution of one cycle in an azimuth direction in a cross section of the first laser beam included in an arbitrary virtual plane perpendicular to an optical axis of the first laser beam. The detection device detects an azimuth angle of an intensity centroid of an interference pattern generated by at least a part of a first laser beam that has passed through the phase conversion device, and a part of a second laser beam that derives from a laser beam as seed light from which the first laser beam derives, of which an optical intensity is same as the at least a part of the first laser beam, and detects an inter-beam phase difference of the second laser beam.

Phase difference measuring device, beam output apparatus and phase difference measuring method

A light-emitting device includes an optical fiber, a first light source unit, and a second light source unit. The optical fiber includes a wavelength converting portion. The wavelength converting portion is provided between a light incident portion and a light emerging portion. The wavelength converting portion contains a wavelength converting material. The wavelength converting material is excited by excitation light to produce a spontaneous emission of light having a longer wavelength than the excitation light and amplifies the spontaneous emission of light to produce an amplified spontaneous emission of light. The first light source unit makes the excitation light incident on the light incident portion. The second light source unit makes seed light, causing a stimulated emission of light to be produced from the wavelength converting material that has been excited by either the excitation light or the amplified spontaneous emission of light, incident on the light incident portion.

Light-emitting device and optical fiber

A multi-beam combining apparatus includes a phase shifting section, a superposing section, an observing section and a phase control section. The phase shifting section generates a plurality of phase-shifted laser beams by shifting the phase of each of the plurality of laser beams. The superposing section generates a plurality of superposed laser beam by superposing the reference laser beam and each of the plurality of phase-shifted laser beams. The observing section generates interference pattern data of a spatial interference pattern which appears when observing each of the superposed laser beams. The phase control section carries out a feedback control of the phase shifts in the phase shifting section based on the interference pattern data obtained for every superposed laser beam, and thereby sets the plurality of phase-shifted laser beams to desired states.

Multi-beam combining apparatus

A laser devicedemultiplexes seed light Linto a plurality of beams of laser light Land then continuously optically amplifies the plurality of beams of the laser light Lwith an amplifier. Therefore, its amplification factor can be set higher than that in the case of amplifying pulsed laser light. When producing multiplexed light Lby multiplexing the beams of the amplified laser light Lwith a diffraction grating, respective phases of the beams of the laser light Lare controlled such that an output peak of the multiplexed light Lrepeatedly appears at a converging position Pat a predetermined time interval. This produces pulsed laser light at the converging position Pfrom a plurality of beams of laser light Lamplified at a high amplification factor. Hence, this laser devicecan produce pulsed laser light with a high output.

Laser device

A laser gain medium includes an optical medium configured to transmit a laser beam and having an incident face, a first face, a second face opposing to the first face; and gain media configured to amplify the laser beam while reflecting the laser beam. At least one of the gain media is joined on a first face of the optical medium as a first face gain medium, and at least one of the remaining gain media is joined on a second face of the optical medium as a second face gain medium. The laser beam is incident into the optical medium, and is amplified by the first face gain medium and the second face gain medium while being alternately reflected by the first face gain medium and the second face gain medium.

Laser gain medium and laser oscillator using the same

The present invention is made to provide an extreme ultraviolet light source target or an X-ray source target having a good operationality. An extreme ultraviolet light source target in accordance with an aspect of the present invention is obtained by including a heavy metal such as tin into a matrix made of a polymeric material such as hydroxylpropylcellulose (HPC). The target can be manufactured by mixing the heavy metal and the polymeric material with a solvent, and evaporating the solvent. Since the target uses the polymeric material as a matrix, the target can be easily deformed to have a desired shape. For this reason, the target can be easily attached to a target holder irrespective of the shape of the holder, resulting in a good operationality of the target. Furthermore, an emission efficiency can be improved by including the heavy metal at a low density.

Extreme ultraviolet light and X-ray source target and manufacturing method thereof

An object of the present invention is to provide an extreme ultraviolet light source target which can emits extreme ultraviolet light with high emission efficiency. A solid target made of heavy metal or heavy-metal compound and having a density 0.5 to 80% that of the crystal density is used. When the target is irradiated with a laser beam, plasma of the heavy metal contained in the target is generated, and extreme ultraviolet light having a predetermined wavelength which corresponds to the kind of the heavy metal is emitted from the plasma. When the density of the target is made to be smaller than the crystal density as described above, space distribution of the density of the generated plasma can be controlled, and the region in which plasma absorbs energy of the laser beam overlaps the region in which the plasma emits the extreme ultraviolet light. Thus, emission efficiency can be improved, preventing energy loss. For example, in a case where the SnOtarget having a density 24% of the crystal density is used, the emission efficiency at around 13.5 nm wavelength is higher than in the case where a Sn crystal target is used.

Extreme ultraviolet light source and extreme ultraviolet light source target

Growing community of inventors

Suita, Japan

Noriaki Miyanaga