Tokyo Electron Limited

Noriaki Kanaya

Kenichi Kobayashi

Takehiro Kinoshita

Yasuhiro Tsuruma

Masanori Saito

Takashi Oe

Hiroshi Ogino

A reception unit receives a processing instruction including a recipe. A calculation unit calculates an identifier from the recipe received by the receiving unit. A determination unit determines whether an identical identifier to the calculated identifier is stored in a memory. A control unit controls a substrate processing apparatus using an operation data item associated with the identical identifier and the recipe received by the receiving unit when the determination unit determines that the identical identifier is stored in the memory.

Information processing apparatus and substrate processing method

A semiconductor manufacturing system includes: a local operation terminal that displays an apparatus screen of a semiconductor manufacturing apparatus; at least one remote operation terminals that are connected to the semiconductor manufacturing apparatus via a network, and display the apparatus screen; and a controller that controls the semiconductor manufacturing apparatus based on an operation received from a user by the local operation terminal and the remote operation terminal that display the apparatus screen. The control device includes: a login state managing unit; an apparatus screen display state managing unit; and a screen data creating unit that creates screen data of the apparatus screen based on the simultaneous login state and the apparatus screen display state.

Semiconductor manufacturing system, control device, and control method

Growing community of inventors

Sapporo, Japan

Noriaki Kanaya