Panasonic Intellectual Property Management Co., Ltd.

Noriaki Amo

Kazuyoshi Honda

Sadayuki Okazaki

Satoshi Shibutani

Noriyuki Uchida

Yasuharu Shinokawa

A conveyance systemA of a film-forming apparatusA includes a blowing rollerhaving a function of supplying a cooling gas toward a substrate. The blowing roller has the first shelland the internal block. The first shellhas a plurality of first through holesas a gas supply channel, and is rotatable in synchronization with the substrate. The internal blockis disposed inside the first shell. A manifoldis defined by the internal blockinside the first shell. The manifoldis formed so as to introduce the gas toward the plurality of first through holeswithin the range of a holding angle. A clearancefacing the plurality of first through holesoutside the range of the holding angle is further formed inside the first shell. In the radial direction, the manifoldhas a relatively large dimension, and the clearancehas a relatively small dimension.

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Hyogo, Japan

Noriaki Amo