Asml Holding N.v.

Noreen Harned

Robert D Harned

Cheng-Qun Gui

Lev Sakin

Irina I Pozhinskaya

Patrick De Jager

A method of combining output of a plurality of light sources includes arranging a plurality of light sources in the same plane and having their beams directed at a first mirror, rotating the first mirror in the plane so as to direct the beams towards the same direction, and pulsing the light sources in synchronization with the rotation of the first mirror. The light sources can include, for example, pulsed lasers or lamps. The method can further include directing the beams from the first mirror towards a second counter-rotating mirror, wherein rotation of the second counter-rotating mirror compensates for angular displacement of the beams due to rotation of the first mirror. The method can also include orienting the first mirror at about 45 degrees relative to an incident path of the beams. This method can be used, for example, to expose a substrate in a lithography system.

Multiple illumination source exposure apparatus

An exposure system for manufacturing flat panel displays (FPDs) includes a reticle stage and a substrate stage. A magnification reflective optical system images the reticle onto the substrate. The system may be a 2&#xd7; magnification system, or another magnification that is compatible with currently available mask sizes. By writing reticles with circuit pattern dimensions that are one-half the desired size for an FPD, a 2&#xd7; optical system can be used to expose FPDs. The designs for the 1.5&#xd7; and larger magnification optical systems all typically have at least three powered mirrors. A corrector, positioned either near the reticle or near the substrate, can be added to the three mirror design to improve the systems optical performance. The corrector may be a reflective, or a refractive design. The corrector can have an aspheric surface, and optionally a powered surface.

Large field of view 2X magnification projection optical system for FPD manufacture

A system for combining outputs of multiple light sources includes a plurality of light sources, and a rotatable fold mirror oriented at an angle so as to reflect beams from each of the light sources towards the same direction at various times during its rotation. A projection optical system directs the beams towards a substrate. The light sources can be pulsed lasers or lamps. The rotatable fold mirror can be mounted on an air bearing, a magnetic bearing, or a fluid bearing, and can be oriented at about 45 degrees relative to the vertical. An optional fold mirror for folding an optical axis of the system is between the rotatable fold mirror and the projection optical system. The fold mirror can counter-rotate in synchronization with the rotatable fold mirror so as to keep the direction of the beams constant. The rotatable fold mirror can be mounted on an air bearing, which in turn is mounted on an air bearing support. The air bearing and the air bearing support have a pass hole for passing the beams. Alternatively, the rotatable fold mirror can be mounted below an air bearing support.

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Redding, CT, United States of America

Noreen Harned