Carl Mahr Holding Gmbh

Leica Geosystems Ag

Hexagon Technology Center Gmbh

Norbert Steffens

Peter Lehmann

Bo Pettersson

Pascal Jordil

Frank Brossette

A coordinate measuring machine based on a delta robot structure comprising a base plate, arms, a movable platform with a probe, and a control unit for controlling the movement of the movable platform. The base plate is configured to accommodate a first workpiece and the probe is arranged the movable platform so as to utilize the free inside space of the delta robot structure between the arms as measuring volume.

Measuring machine based on a delta robot assembly

In a modular measuring head system comprising a central module having the shape of a parallelepiped block with six sides, the central module encloses an interior space and is provided on at least five sides with attachment sites, each having at least one opening leading to the interior space. Together with additional modules, the central module forms a modular building structure based on a highly diverse optical measuring head including at least several of an illumination module, a lens module, a mirror module and a camera module. Each of these optional modules can be at least indirectly attached to at least one of the attachment sites.

Modular measuring head system

The apparatus and method according to the invention includes an objective () which is capable of operating basically in two different measuring modes. In a first interference mode, a measuring object () is interference&#x2014;optically measured. In a second imaging operating mode on a detector array () designed like a camera, an optical image is generated, which is supplied to an image processing routine. The switching over between the two operating modes occurs by switching the illumination devices which are associated with different locations of the beam path of the apparatus&#x2014;when viewed from the camera, one in front of a beam divider and the other behind the beam divider, which couples a reference light path to the beam path.

Apparatus and method for a combined interferometric and image based geometric determination, particularly in the microsystem technology

The apparatus according to the invention comprises an object lens which can operate in at least two different measuring modes. In a first, interference mode a workpiece is measured by means of interference optometry. In a second, imaging measuring mode an optical image is produced, for example, on a camera-like detector array and may be applied to an image processing routine. Switching between the two measuring modes is performed by the type of illumination of the object lens and an element which is disposed preferably in the reference beam path of an interferometer and which activates or deactivates the reference beam path dependent on the spectral composition of the utilized light. In this manner a simple and rapid changeover between the two measuring modes is provided, without the need for replacing or even for moving the object lens. Apart from the rapidity of changeover, a good correlation is achieved between the measuring data which are yielded by the interferometry and by the image processing and which are obtained in one and the same reference coordinate system.

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Überherrn, Germany

Norbert Steffens