Carl-zeiss-stiftung

Norbert Schafer

Dieter Kurz

Eugen Weimer

Herbert Gross

Bernd Eppli

Eberhard Rossow

A detector is disclosed which includes an elliptical hollow mirror and a tube having a reflecting inner surface for conducting the light emitted by a specimen under investigation in a scanning electron microscope. A vacuum window is seated at the outer end portion of the tube directly ahead of a receiver.

Cathodoluminescence detector utilizing a hollow tube for directing light

A detector for back-scattered electrons includes a scintillator crystal and a light-conducting device for directing away the secondary radiation to a receiver. The light-conducting device is placed against the scintillator crystal in such a way that the secondary radiation is directed away symmetrically to two lines of symmetry. The two lines of symmetry are located in the plane of the scintillator crystal and are at right angles to one another. In this way, a uniform illumination of the scanned image is obtained.

Detector for back-scattered electrons

The invention is directed to a method of preventing cathode damage when switching on an electron gun having a field emission cathode assembly including a cathode, a first electrode and a ground electrode. During normal operation of the electron gun, an extraction voltage is applied across the cathode and the first electrode and an accelerating voltage is applied across the cathode and the ground electrode. A direct galvanic connection is established between the cathode and the first electrode prior to normal operation of the electron gun. During a burn-in period, only the accelerating voltage is applied. This accelerating voltage may include an overvoltage of up to twenty percent. Then the galvanic connection between the cathode and the first electrode is interrupted and the extraction voltage is applied. An arrangement for carrying out the invention is also disclosed.

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Essingen, Germany

Norbert Schafer