Heraeus Quarzglas Gmbh & Co Kg

Norbert Otto

Martin Trommer

Hilmar Laudahn

Klaus-Uwe Badeke

Andreas Brueckel

A method for producing synthetic fused quartz is provided. The method includes evaporating a feedstock material which contains at least one polymerizable polyalkylsiloxane compound, and supplying the feedstock material vapor to a reaction zone, wherein the feedstock material vapor is converted by oxidation and/or by hydrolysis into SiOparticles. The feedstock material vapor is passed through a membrane filter as a cleaning device to reduce the formation of gel, which is typically associated with the production of synthetic fused quartz.

Method and apparatus for producing fused quartz from a polymerizable polyalkylsiloxane compound with membrane filter as cleaning device

The invention relates to a method for producing synthetic quartz glass by vaporizing a polyalkylsiloxane as a liquid SiOfeedstock (), converting the vaporized SiOfeedstock () into SiOparticles, separating the SiOparticles, forming a soot body () and vitrifying the soot body (). According to the invention, the vaporizing of the heated SiOfeedstock () comprises an injection phase in an expansion chamber (), in which the SiOfeedstock () is atomized into fine droplets, wherein the droplets have an average diameter of less than 5 pm, and wherein the atomizing of the droplets takes place in a preheated carrier gas stream which has a temperature of more than 180&#xb0; C.

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Teutschenthal, Germany

Norbert Otto