Asml Netherlands B.v.

Koninklijke Philips Corporation N.v.

Norbert Erwin Therenzo Jansen

Sander Frederik Wuister

Yvonne Wendela Kruijt-Stegeman

Andre Bernardus Jeunink

Catharinus De Schiffart

Johan Frederik Dijksman

Michael Jozef Mathijs Renkens

Toon Hardeman

Gerard Van Schothorst

George Arie Jan De Fockert

Gregor Edward Van Baars

Johannes Petrus Martinus Bernardus Vermeulen

Raymond Wilhelmus Louis Lafarre

Tjarko Adriaan Rudolf Van Empel

Martijn Houkes

Richard Van Der Laan

Jan Hermannus Post

Erik Cornelis Maria Verhoeven

An imprint lithography apparatus having a first frame to be mounted on a floor, a second frame mounted on the first frame via a kinematic coupling, an alignment sensor mounted on the second frame, to align an imprint lithography template arrangement with a target portion of a substrate, and a position sensor to measure a position of the imprint lithography template arrangement and/or a substrate stage relative to the second frame.

Imprint lithography

A positioning apparatus includes a first object and a second object; a positioning system configured to position the first and the second objects with respect to each other; and a flexible transportation line that is connected to the first and the second objects, the flexible transportation line having a stiffness that varies along the flexible transportation line such that the flexible transportation line can be represented by a dynamic transfer function, the dynamic transfer function being adapted to a closed-loop transfer function of the positioning system.

Lithographic apparatus with flexible transportation line having varying stiffness between two objects

An arrangement suitable for use in an imprint lithography apparatus is disclosed. The arrangement includes a support structure arranged to support an imprint template arrangement, a first actuator configured to apply a force to the imprint template arrangement, and a second actuator attached to the support structure, and arranged in use to extend between the support structure and the imprint template arrangement, the second actuator configured to apply a force to the imprint template arrangement, a range of movement of the second actuator being greater than a range of movement of the first actuator.

Imprint lithography apparatus

An imprint lithography apparatus is disclosed that has a first support structure arranged to support an imprint template, and a first actuator attached to the first support structure, and arranged in use to be located between the first support structure and the imprint template. The first actuator is configured to apply a force to the imprint template. The imprint lithography apparatus further includes a second support structure and a second actuator located between the second support structure and the first support structure. The second actuator is configured to apply a force to the second support structure, wherein a range of movement of the second actuator is greater than a range of movement of the first actuator.

The invention relates to an image display device comprising at least three light panels for emitting at least three light beams having different colors, combination means which are rigidly connected to a frame for combining the three light beams to a combined light beam for projection on a screen, positioning means for spatially positioning the three light panels and fixation means for fixing a position, adjusted with the aid of the positioning means, of the individual light panels with respect to the combination means, wherein the positioning means comprise three plate-shaped elements for each light panel, which elements are oriented at right angles to the associated light panel and are each rigidly connected to the frame along a connecting edge, and are each pivotally connected to the associated light panel at a distance from the connecting edge.

Display device

An actuator having two parts ( ) which extend in a main plane and are mutually connected by three bridges ( ). The bridges can be shortened in respective shortening (Y , Y , Y ) directions parallel to the main plane by local heating and subsequent cooling down of the bridges. According to the invention, the shortening directions of the three bridges are parallel, and the two parts of the actuator are rotated relative to one another about an axis of rotation ( ) extending perpendicularly to the main plane through alternate shortening of two adjacent bridges ( or ) of the three bridges. The two parts of the actuator can be rotated relative to one another in two opposite directions.

Actuator having three bridges

Growing community of inventors

Eindhoven, Netherlands

Norbert Erwin Therenzo Jansen