Stmicroelectronics S.r.l.

Noemi Graziana Sparta

Sebastiano Ravesi

Stella Loverso

Corrado Accardi

Salvatore Lombardo

Cosimo Gerardi

Marina Foti

Silvestra Dimarco

The disclosure relates to an encapsulated flexible electronic device comprising a flexible electronic device, wherein the flexible electronic device is protected by a protective coating layer, a first cover sheet and a second cover sheet being made of patterned and developed dry photoresist films. The encapsulated flexible electronic device may be used to directly realize different type of electronic devices, such as smart sensor devices.

Encapsulated flexible electronic device, and corresponding manufacturing method

A manufacturing method of an electrochemical sensor comprises forming a graphene layer on a donor substrate, laminating a film of dry photoresist on the graphene layer, removing the donor substrate to obtain an intermediate structure comprising the film of dry photoresist and the graphene layer, and laminating the intermediate structure onto a final substrate with the graphene layer in electrical contact with first and second electrodes positioned on the final substrate. The film of dry photoresist is then patterned to form a microfluidic structure on the graphene layer and an additional dry photoresist layer is laminated over the structure. In one type of sensor manufactured by this process, the graphene layer acts as a channel region of a field-effect transistor, whose conductive properties vary according to characteristics of an analyte introduced into the microfluidic structure.

Manufacturing method of a graphene-based electrochemical sensor, and electrochemical sensor

Solar thin film modules are provided with reduced lateral dimensions of isolation trenches and contact trenches, which provide for a series connection of the individual solar cells. To this end lithography and etch techniques are applied to pattern the individual material layers, thereby reducing parasitic shunt leakages compared to conventional laser scribing techniques. In particular, there may be series connected solar cells formed on a flexible substrate material that are highly efficient in indoor applications.

Thin film solar cell module including series-connected cells formed on a flexible substrate by using lithography

The disclosure relates to a three-dimensional integrated structure comprising a substrate and a plurality of projecting elements projecting from a flat surface thereof and obtained from a patterned and developed dry film photoresist. Advantageously, the three-dimensional integrated structure is highly defined, the projecting elements obtained by the patterned and developed dry film photoresist having a shape factor greater than 6. The three-dimensional integrated structure can be used to directly realize different type of electronic devices, such as microfluidic devices, microreactors or sensor devices.

Three-dimensional integrated structure having a high shape factor, and related forming method

A method transfers a graphene layer from a donor substrate onto a final substrate. The method includes: providing a metal layer on the donor substrate; and growing a graphene layer on the metal layer. The method also includes: laminating a dry film photo-resist on the graphene layer; laminating a tape on the dry film photo-resist; chemically. etching the metal layer, obtaining an initial structure that includes the tape, the dry film photo-resist and the graphene layer; laminating the initial structure on the final substrate; thermally realizing the tape, so as to obtain an intermediate structure that includes the dry film photo-resist, the graphene layer and the final substrate; removing the dry film photo-resist; and obtaining a final structure that includes the final substrate with a transferred graphene layer.

Method for transferring a graphene layer

A method of manufacturing an electronic device on a plastic substrate includes: providing a carrier as a rigid support for the electronic device; providing a metallic layer on the carrier; forming the plastic substrate on the metallic layer, the metallic layer guaranteeing a temporary bonding of the plastic substrate to the carrier; forming the electronic device on the plastic substrate; and releasing the carrier from the plastic substrate. Releasing the carrier comprises immersing the electronic device bonded to the carrier in a oxygenated water solution that breaks the bonds between the plastic substrate and the metallic layer.

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Catania, Italy

Noemi Graziana Sparta