Applied Materials, Inc.

Noel Manto

Hung Chih Chen

Hui W Chen

Simon Yavelberg

Lakshmanan Karuppiah

David J Lischka

Alpay Yilmaz

Jim Kellogg Atkinson

Dan Zhang

Jonathan Paul Domin

Haochuan Zhang

Toshikazu Tomita

Embodiments described herein relate to an apparatus and method for a roller assembly that may be utilized in a brush cleaning module. In one embodiment, a roller assembly is described. The roller assembly includes an annular groove having at least two substantially parallel opposing sidewalls adapted to contact the major surfaces of a substrate along a periphery of the substrate, each of the opposing sidewalls comprising a compressible material having a pre-compressed dimension that is less than a thickness of the periphery of the substrate.

Roller assembly for a brush cleaning device in a cleaning module

In a first aspect, a first apparatus is provided. The first apparatus includes a through-beam sensor coupled to a scrubber and adapted to detect a notch or flat of a substrate in the scrubber during processing. The through-beam sensor has (1) an emitter facing a first major surface of a substrate in the scrubber and adapted to transmit a beam toward an edge of the first major surface; and (2) a receiver facing a second major surface of the substrate and adapted to receive the beam transmitted from the emitter when the edge of the substrate does not obstruct the beam. Numerous other aspects are provided.

Methods and apparatus for detecting a substrate notch or flat

Embodiments of a load cup for transferring a substrate are provided. The load cup includes a pedestal assembly having a substrate support and a de-chucking nozzle. The de-chucking nozzle is positioned to flow a fluid between the polishing head and the back side of a substrate during transfer of the substrate from the polishing head to the substrate support.

Load cup for chemical mechanical polishing

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Walnut Creek, CA, United States of America

Noel Manto