Wd Media, LLC

Noe D Taburaza

Phi Cam Ha

Allen J Bourez

Tatsuru Tanaka

Chang Bok Yi

Jinliang Chen

Yew Ming Chiong

Hongling Liu

A cryogenic dynamic cooling apparatus and a cooling method for heat assisted magnetic recording media substrate are provided. The cooling apparatus includes a chamber that is configured to receive a substrate. A substrate holder secures the substrate inside the chamber. The apparatus has a cooling plate that is movable between a retracted position and an extended position inside the chamber. The cooling plate provides clearance for movement of the substrate holder inside the chamber in the retracted position, and the cooling plate cools the substrate in the extended position. Also, the cooling plate is substantially parallel to and spaced apart from the substrate. The apparatus further includes a cryogenic operatively coupled to the cooling plate that is cooled by the cryogenic cooling element.

Method and apparatus for cryogenic dynamic cooling

A station for a disk processing system includes a load lock chamber, a variable conductance valve configured to connect the chamber to a vacuum pump, and valve controller. The valve controller may include a processor that controls an electromechanical actuator to adjust the conductance of the valve during the evacuation of the chamber.

Load lock with variable conductance valve

A disk processing system with a corner chamber having a heater assembly and a carrier rotary assembly configured to rotate the heater assembly.

Corner chamber with heater

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Union City, CA, United States of America

Noe D Taburaza