Mitsubishi Denki Kabushiki Kaisha

Dai Nippon Printing Co., Ltd.

Nobuyuki Kanda

Noriyuki Takahashi

Keiichi Konishi

Mitsuharu Hashiba

Masayasu Miyajima

Keisaku Zenmei

Hiroko Tanaka

Hiroyuki Nakajima

Shu Shimada

The present invention provides a method of cleaning a storage case to be used for storing or transporting mask substrates such as photomasks and photomask blanks, semiconductor substrates such as semiconductor wafers, pellicles, or the like. The present invention: facilitates a regular cleaning operation, can be used also for a storage case of a complicated shape, does not require a large scale equipment or an expensive equipment to facilitate an environmental countermeasure, and provides high cleaning effect. The method of cleaning a storage case polluted by adhesion of a foreign substance of an organic material, an ionic foreign substances or an ionic crystal foreign substance physically absorbed, comprises a step of placing the storage case still in air flow of cleaned air or an inert gas in a temperature range from room temperature to 80&#xb0; C. for desorbing and removing the foreign substance adhered to the storage case.

Method of cleaning storage case

A variable-discharge high pressure pump capable of facilitating the manufacturing and providing sufficient lubrication. The pump comprises a cam shaft provided with a cam surface by which a tappet displaces in accordance with the cam surface, a plunger connected to the tappet to reciprocate in accordance with the reciprocation of the tappet and accommodated in a cylindrical cylinder. Also included are a cylinder head having a contact surface brought into contact with one end surface of the cylinder. The cylinder head has a small-diameter recess portion made in the contact surface to be coupled to the cylinder and constitutes a pump chamber in conjunction with a head portion of the plunger. Further, the cylinder head holds a fuel introduction device for introducing external fuel into a fuel supply passage communicating with the pump chamber, a solenoid valve for opening and closing the fuel supply passage in accordance with an energization state thereto, and a fuel discharging device for discharging fuel compressed in the pump chamber. The cylinder is placed through a fixing device into contact with the cylinder head.

Variable-discharge high pressure pump

A check valve and a seating valve incur less deformation of a seat, providing good sealing performance. The check valve has: a holding space (36) which is provided in a fluid passage (8); a seating valve (41) which has a main body (41a) having a passage bore (41b) formed along the central axis thereof and a neck (41c) which is vertically provided along the outer peripheral portion of the passage bore (41b) on the end surface at one side of the main body (41a) and which has a seat (41d) formed at the distal end thereof, and which is arranged such that the end surface thereof at the opposite side from the neck (41c) comes into contact with a bottom surface (25a) of a recessed section (25); a valve element (32) which holds a seating surface against the seat (41d); an elastic member (33) which is provided in the holding space (36) in a compressed state to urge the valve element (32) toward the seat (41d); and a fixing member (31) which applies load to a shoulder (41e) of the main body (41a) along the central axis of the main body (41a) so as to secure the seating valve (41) to the bottom of the recessed section (25); wherein a thin wall portion (41g) is formed between the load point of the shoulder (41e) and the seat (41d).

Check valve and seating valve

Growing community of inventors

Tokyo, Japan

Nobuyuki Kanda