Panasonic Intellectual Property Management Co., Ltd.

Panasonic Corporation

Nobuyuki Ibara

Takeshi Okada

Hideki Ueda

Takeshi Mori

Yuji Suzuki

Hitoshi Yoshida

Katsumi Kakimoto

Katumi Kakimoto

Jun Ogihara

Kazuo Goda

Masatoshi Nomura

Masatosi Nomura

Shinichi Kishimoto

Takumi Taura

Hitoshi Yosida

An acceleration sensor includes a weight portion having a recess section and a solid section, beam portions, a movable electrode provided on the opposite surface of the weight portion from an open surface of the recess section to extend over the recess section and the solid section, a first fixed electrode arranged at the opposite side of the movable electrode from the recess section, and a second fixed electrode arranged at the opposite side of the movable electrode from the solid section. The acceleration sensor detects acceleration using a change in capacitance between the movable electrode and the fixed electrodes caused by rotation of the weight portion. The beam portions are shifted toward the recess section such that an angle between a perpendicular line extending from a gravity center position of the weight portion to the rotation axis and a surface of the movable electrode becomes equal to 45 degrees.

Acceleration sensor

An electrostatic capacitance sensorincludes a semiconductor substrate. A first fixing plateis joined to a one-side surfaceof the semiconductor substrate, and a second fixing plateis joined to other-side surfaceof the semiconductor substrate, whereby a space portion S is formed. Then, static electricity suppressing meansfor suppressing static electricity from being generated in the space portion S is provided in the electrostatic capacitance sensor

Electrostatic capacitance sensor

An acceleration sensor includes: a rectangular moving electrode; a pair of beams which connect to centers of two opposite sides of the moving electrode, and support the moving electrode freely swingably; and first and second fixed electrodes which are provided on one side and other side of a boundary line, respectively, and are arranged to be opposed to a front surface of the moving electrode at a predetermined interval. A straight line that connects the pair of beams to each other is taken as the boundary line. Then, on a back surface of the moving electrode, first and second recessed portions are formed on one side of the boundary line and the other side thereof, respectively.

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Osaka, Japan

Nobuyuki Ibara