Takenaka Corporation

Thk Co., Ltd.

Mitsubishi Steel Mfg. Co., Ltd.

Takenaka Corporation, a Japanese Corporation

Tokyo Kiki Kabushiki Kaisha

Nobuyoshi Murai

Kazuyoshi Katayama

Yoshinori Takahashi

Takeki Shirai

Hidekazu Michioka

Masashi Konomoto

Hiroshi Kurabayashi

Toshio Omi

Masashi Yasuda

Daisuke Yaguchi

Atsuhiko Mori

Masashi Yamamoto

Yoshihide Uchiyama

Yuji Sano

Hirokazu Yoshioka

A seismic isolator includes a lower guide rail 4 having grooves on the side surfaces thereof and fitted to an upper surface of a lower plate 1, an upper guide rail 6 having grooves on the side surfaces thereof and fitted to a lower surface of an upper plate in a direction criss-crossing the lower guide rail 4, a block body 9 clamping at its lower part the lower guide rail 4 and clamping at its upper part the upper guide rail 6, a large number of rollers interposed between the lower guide rail 4 and the block body 9 and between the upper guide rail 6 and the block body 9, a large number of balls interposed between grooves of the side surfaces of the lower guide rail 4 and the block body 9 and between grooves of the side surfaces of the upper guide rail 6 and the block body 9 and a flexible member 22 fitted between the lower surface of the upper plate and the upper surface of the lower plate 1.

Large-scale high strength seismic isolator

A damping support structure for preventing vibrations of an apparatus table supporting an apparatus for manufacturing ultra-high precision devices such as semiconductors and printed circuit boards. The apparatus table is supported in suspension by support members, with its apparatus mounting surface disposed at a low level. The support members are supported by stationary members through vertically extendible and contractible first air springs. Horizontally extendible and contractible second air springs are disposed between the stationary members and the apparatus table. The first and second air springs serve to mitigate vertical and horizontal vibrations of the apparatus table, respectively. At the same time, in response to vibrations of the apparatus table detected by vibration sensors, air supply from air supply devices to inside spaces of the first and second air springs is controlled to apply controlling forces to the apparatus table through the first and second air springs for displacing the apparatus table relative to the stationary members and maintaining the apparatus table in an absolutely stationary state.

Damping support structure

A damping support structure for preventing vibrations of an apparatus table supporting an apparatus for manufacturing ultra-high precision devices such as semiconductors and printed circuit boards. The apparatus table is supported by a support deck suspended to be horizontally displaceable. Linear motors are actuated in response to vibrations of the apparatus table detected by vibration sensors. The apparatus table is thus displaceable relative to a stationary section, to be safeguarded against the vibrations.

Growing community of inventors

Sakai, Japan

Nobuyoshi Murai