Murata Manufacturing Co., Ltd.

Nobuyoshi Adachi

Shinsuke Ikeuchi

Fumiya Kurokawa

Seiji Umezawa

Yutaka Kishimoto

Yoichi Mochida

Masayuki Suzuki

A piezoelectric device includes a substrate, a piezoelectric element, and a lid. The piezoelectric element includes a base portion and a membrane portion. The base portion is on a first main surface and has an annular outer shape when viewed from a normal direction of the first main surface. The membrane portion is at an inner side portion of the base portion when viewed from the normal direction. The lid is on the first main surface, covers the piezoelectric element, and is spaced apart from the piezoelectric element on the first main surface side. In the substrate, a first through hole extending from the first main surface to a second main surface is facing the membrane portion. The membrane portion includes a through slit.

Piezoelectric device and ultrasonic transducer

A piezoelectric transducer includes beam portions each with a fixed end portion and extending in a direction away from the fixed end portion. A base portion is connected to the fixed end portion of each of the beam portions. The beam portions extends in a same plane, and respective extending directions of at least two beam portions are different from each other. The beam portions each include a single crystal piezoelectric layer having a polarization axis in a same direction, an upper electrode layer, and a lower electrode layer. A polarization axis has a polarization component in the plane. An axial direction of an orthogonal axis that is orthogonal to the polarization axis and extends in the above-described plane intersects with an extending direction of each of the plurality of beam portions.

Piezoelectric transducer

Growing community of inventors

Nagaokakyo-shi, Japan

Nobuyoshi Adachi