Tokyo Electron Limited

Nobutaka Yoshioka

Takashi Mochizuki

Kentaro Asakura

Takahisa Mase

Melvin Verbaas

Saki Matsuo

Multi-point thermocouples and assemblies are disclosed for ceramic heating structures. The disclosed embodiments provide multi-point connections in distinct areas to provide good temperature-sensing contacts between metal thermocouples and ceramic bodies while also providing improved flexibility. As such, cracking of ceramic bodies for heating structures is avoided. For one embodiment, assemblies including a multi-point thermocouple and a ceramic body are used in bake plates for processing systems that process microelectronic workpieces. The metal thermocouple has a flat surface used for connections to the ceramic body. Preferably, the thermocouple is relatively thin and provides improved connection sites and flexibility.

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Yamanashi, Japan

Nobutaka Yoshioka