Average Co-Inventor Count = 5.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Screen Holdings Co., Ltd. (2 from 1,111 patents)
2 patents:
1. 10096493 - Substrate treatment apparatus, and substrate treatment method
2. 9601358 - Substrate treatment apparatus, and substrate treatment method