Toyo Tanso Co., Ltd.

Nobutaka Manabe

Noriyuki Tanaka

Yoshio Shodai

Masashi Kodama

The fluorine gas generation device includes an electrolyzer. An electrolytic bath is formed in the electrolyzer. A cathode is disposed in a cathode chamber, and an anode is disposed in an anode chamber. As a voltage is applied across the cathode and the anode, electrolysis of HF (hydrogen fluoride) takes place. In the electrolyzer, hydrogen gas is primarily generated from the cathode and fluorine gas is primarily generated from the anode. Two heating furnaces are provided for heating NaF pellets packed in HF adsorption columns. Each heating furnace has two HF adsorption columns disposed therein.

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Osaka, Japan

Nobutaka Manabe