Sumitomo Chemical Company, Limited

Nec Corporation

Asm Japan K.k.

Ulvac, Inc.

Nobutaka Kunimi

Keizo Kinoshita

Jun Kawahara

Akinori Nakano

Kouji Toishi

Nobutoshi Fujii

Kazuo Kohmura

Toshiyuki Araki

Yasuyoshi Hyodo

Yasuyoshi Ueda

Atsushi Inoue

Takashi Omura

Shigeru Sasaki

Masashi Komatsu

Yoshiteru Ohta

A method of forming a porous film on a processing target includes: forming fine organic particles by polymerizing an organic compound in a gaseous phase; mixing the fine organic particles with a silicon compound containing a Si&#x2014;O bond in a gaseous phase, thereby depositing a film containing the fine particles on the processing target; and removing the fine organic particles from the film.

Method for forming porous insulation film

A method of forming a porous film on a semiconductor substrate includes: supplying a silicon compound containing at least one Si&#x2014;O bond in its molecule in a gaseous phase into a reaction chamber; forming a siloxane oligomer through plasma reaction of the silicon compound; and supplying an organic amine in a gaseous phase into the reaction chamber and reacting the organic amine with the siloxane oligomer, thereby forming a porous film on the semiconductor substrate.

A copolymerized high polymer film includes plural organic polymers, as skeleton, and is manufactured by blowing more than two kinds of organic monomers of respectively specific structures, in a vapor phase condition, onto the surface of a heated substrate, through plasma being generated in a reaction chamber. As a result, manufacture of an organic high polymer film capable of further reducing the effective relative permittivity of organic polymer films as a whole can be achieved, and, at the same time, further improvement in mechanical strength of film as well as film forming speed can be achieved.

Copolymerized high polymer film and method of manufacturing the same

A copolymer film having a decreased dielectric constant which is produced by supplying at least two organic monomers as raw materials, forming a film of a copolymer comprising a backbone based on said at least two monomers on a surface of a substrate, and heating the copolymer film at a temperature higher than a temperature at which the copolymer film is formed.

Polymer film and method for producing the same

A polymer film having a low dielectric constant is produced polymerizing a raw material gas containing a compound of the formula (1): wherein PCA represents a polycycloaliphatic hydrocarbon group, ALK represents a divalent aliphatic hydrocarbon group, m is 1 or 2, n is 0 or 1, and R1 and R2 represent independently each other an alkyl group, an alkenyl group, an alkynyl group, an alkoxy group, an aryl group or an aryloxy group by a plasma polymerization method.

A compound of the formula (1): wherein PCA represents a polycycloaliphatic hydrocarbon group, ALK represents a divalent aliphatic hydrocarbon group, m is 1 or 2, n is 0 or 1, and R1 and R2 represent independently each other an alkyl group, an alkenyl group, an alkynyl group, an alkoxy group, an aryl group or an aryloxy group.

Organic silicon compound and method for preparing the same

There is provided a bisazo compound which is useful as a reactive dye for dyeing or printing a fiber material in an orange to scarlet or red color; the bisazo compound being represented by the following formula (1): ##STR1## wherein m and n represents 0 or 1; W represents a divalent connecting group represented by --NH-- or --NHCONH--;

Fiber-reactive bisazo compound

There is provided a monoazo compound which is useful as a reactive dye for dyeing or printing a fiber material in an orange to scarlet color; and intermediate compounds for producing the compound is provided; the monoazo compound being represented by the following formula (1): ##STR1## wherein m represents 0 or 1; R.sup.1 represents a hydrogen atom or a lower alkyl group; D represents a specific diazo component of benzene type having substitution of a fiber reactive group; B.sup.1 represents a direct bond or connecting group; Z.sup.1 represents an alkylcarbonyl group, phenylcarbonyl group or a fiber-reactive group of vinylsulfone, triazine or pirimidine type; a group represented by --NR.sup.1 -- bonds to 6-position or 7-position of a naphthalene ring; and the intermediate compounds being represented by the following formulae (A) or (B): ##STR2## wherein U represents a connecting group such as alkylene and the like, Y represents vinyl or --CH.sub.2 CH.sub.2 L, and L represents a group eliminatable by an action of alkali.

Monoazo compound and an intermediate for a fiber-reactive dye compound

A bisazo compound represented by the following general formula (I) or its salt is a useful fiber-reactive dye: ##STR1## where D is a phenyl or naphthyl group; B is a phenylene group, etc.; U is an aliphatic or aromatic linking group; Z is a vinyl group, etc.; and X and Y are a halogen atom, a pyridinio group, etc.

Bisazo compound and method for dyeing or printing fibrous materials

A monoazo compound useful for dyeing or printing a fiber material represented by the following general formula (I): ##STR1## wherein R.sup.1 represents a hydrogen atom or alkyl; U.sup.1 and U.sup.2 represent a group of the following general formula (U1), (U2) or (U3): ##STR2## wherein Y.sup.1, Y.sup.2 and Y.sup.3 represent --CH.dbd.CH.sub.2 or --CH.sub.2 CH.sub.2 Z wherein Z represents a group which can be eliminated by the action of an alkali; and X.sup.1 and X.sup.2 represent halogeno, pyridinio or a group of the following general formula (X1), (X2), (X3) or (X4): ##STR3## or a salt thereof.

Monoazo compounds and process for dyeing or printing fiber materials

A monoazo compound represented by the general formula (I): ##STR1## wherein A represents alkylene which may be substituted or a group: --(CH.sub.2)m--Q.sup.1 --(CH.sub.2)n-- wherein Q.sup.1 is --O--, --S-- or --NR.sup.3 --, m and n are, independently with each other, 2, 3 or 4 and R.sup.3 is hydrogen, alkyl which may be substituted or phenyl which may be substituted; B represents .beta.-carboxyvinyl, alkyl which may be substituted or phenyl which may be substituted; D represents phenylene which may be substituted; X represents aliphatic, aromatic, alicyclic, cyclic or unsubstituted amino; R.sup.1 and R.sup.2 represent, independently with each other, hydrogen or alkyl which may be substituted; and SO.sub.2 Y is a reactive vinyl sulfone group; or a salt thereof, and a process for dyeing or printing fiber materials using said compound. Said process enables red dyeing or printing of hydroxyl group and/or amido group containing organic materials with excellent fixing in deep dyeing.

Monoazo compounds and dyeing or printing process for fiber materials

A monoazo compound suitable for dyeing or printing materials having a hydroxy group and/or amide group represented by the following general formula (I): ##STR1## wherein D represents a phenyl or naphthyl group; A represents a group represented by the following formula: ##STR2## or A represents a group represented by the following formula: ##STR3## wherein R.sub.1, R.sub.2, R.sub.3, R.sub.4, R.sub.5, R.sub.6, R.sub.7, R.sub.8, R.sub.9, n and Y have the meaning given in the specification; and salts thereof.

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Nobutaka Kunimi