Hitachi, Ltd.

Other

Sumco Corporation

Koji Kato

Nobuo Tsumaki

Hiromitsu Tokisue

Tomoji Watanabe

Hiroki Kawada

Kazue Takahashi

Hiroshi Inoue

Hiroyuki Kitsunai

Hideki Izumi

Toshimitsu Miyata

Hideyuki Yamamoto

Akira Bando

Kazuo Nojiri

Seiichi Nakamura

Hideki Nishihata

Shinjiro Ueda

Hiroshi Inouye

Osami Matsushita

Kazuo Mera

Hisanao Ogata

Masahiro Mase

Muneo Mizumoto

Yoshinori Hakuraku

Kousuke Noda

Seiichi Kikkawa

Toshifumi Koike

Riyuusuke Kasamatsu

Takeshi Okawada

Yoshihisa Awada

Kazuo Ihara

Hiroki Kajiwara

Shigeru Kakuta

Kazunori Tsubuku

Tsuneo Hayashi

Yoichi Kurosawa

This apparatus for manufacturing semiconductor substrates has support disks and holding units holding semiconductor substrates on the support disks. The holding unit has a stopper which is formed of a conductive material and holds the brim of the semiconductor substrate, a stopper holder which supports the stopper at the outer circumferential portion thereof, a retaining member which retains the stopper to the support disk, and a heating unit which heats the stopper.

Apparatus for manufacturing semiconductor substrates

A remote diagnostic system for semiconductor manufacturing equipment which diagnoses user's semiconductor manufacturing equipment connected to a piece of diagnostic equipment which is provided by a third party through a communication network. The diagnostic equipment having at least one diagnostic program which diagnoses said semiconductor manufacturing equipment and a control section which starts the diagnostic program when accessed by a specific user terminal which has been given an access right, and the terminal sends data which is requested by the diagnostic equipment for diagnosis and receives a result of diagnosis from the diagnostic equipment.

Remote diagnostic system and method for semiconductor manufacturing equipment

A vacuum heating furnace comprises a translucent container for retaining a heated object and a heating light source for heating a heated object retained in the translucent container. The translucent container has on its surface a tapered portion to receive transmitted light totally reflected on the inner surface of the translucent container at an angle smaller than a critical angle.

Vacuum heating furnace with tapered portion

Providing a dry cleaning method capable of removing deposition films which adhere to the inner walls of a semiconductor manufacturing apparatus-that is, removing dust production sources therefrom. To this end, the dry cleaning process is supplemented by a step of removing either ion sputtered matter or products of the internal member materials of the apparatus or chemical compounds of such apparatus internal member materials and of an etching gas, in addition to a step of removing etching reaction products. It thus becomes possible to eliminate dust generation due to pealing off of deposition films with an increase in the number of wafers being processed, which in turn increases the manufacturing yield and working efficiency of the manufacturing apparatus.

Plasma treatment method and manufacturing method of semiconductor device

A device for holding an object by electrostatic force includes a body made of a dielectric of a low resistivity, such as SiC, and an electrode provided on that surface of the device body facing away from a holder surface, so that a potential difference is produced between the object and the holder surface. A change-over switch for grounding the device body to an earth potential of an ambient environment is provided, so that the dielectric can be rapidly brought into a potential equal to the earth potential.

Holder device and semiconductor producing apparatus having same

A lubricant supply source is disposed in the vicinity of a sliding or rotary portion of a machine element, and an electrical power source is intermittently driven by a controller, so as to intermittently supply lubricant from the lubricant supply source to the machine element. When required, a sensor for monitoring the operating state of the machine element, and/or a remote controller is used, so that the supply of lubricant is controlled on the basis of the signal of the sensor and/or by means of the remote controller. Consequently, lubricant can be supplied or supplemented to the machine element in accordance with necessity. Therefore, the machine element will be able to stably operate for a long time, even in relative inaccessible places which people cannot inadvertently access.

Method of supplying lubricant and apparatus for the same

An apparatus for holding or conveying an article to be held or conveyed by a fluid film having, in a holding surface or a delivery surface, fluid injection portions for supplying fluid at a low flow velocity to form the fluid film between the holding or conveying surface and the article to be held or conveyed.

Apparatus for holding and/or conveying articles by fluid

A guiding apparatus having a slider supported in a floating manner above a base by means of hydrostatic bearings, a pressurized fluid supplying means for supplying the hydrostatic bearings with a pressurized fluid, and detecting means for detecting the displacement of the slider with respect to a designated coordinate. The pressure of the pressurized fluid from the pressurized fluid supplying means is adjusted in accordance with a signal which is obtained as a result of the comparison between the value representing the reference position of the slider with respect to the base and the value actually measured by the detecting means, thereby adjusting the sizes of the gaps for forming hydrostatic fluid film for the hydrostatic bearings, thereby to correct the position of the slider to the designated position. With this arrangement, the absolute position of the slider is precisely determined without being affected by disturbance factors such as the precision of assembling of the base and the slider. This guiding apparatus is suited to use as precision positioning apparatus such as that used in the assembly of photomodule elements.

Guiding apparatus

A vibration-controlling bearing for controlling vibration developing in a rotary shaft supported in a housing of a rotary machine including a bearing member of a cylindrical shape interposed between an outer peripheral surface of the rotary shaft and an inner peripheral surface of the housing and spaced apart therefrom by respective gaps. A dynamic pressure is generated between an inner peripheral surface of the bearing member and the outer peripheral surface of the rotary shaft. Communicating ducts are formed in the bearing member for transmitting a portion of the dynamic pressure generated to a gap between the outer peripheral surface of the bearing member and the inner peripheral surface of the housing.

Vibration-controlling bearing

A cryogenic liquefied pump system which includes a pump having a drive motor, bearings, a drive shaft, and an impeller adapted to be disposed in a vessel storing a cryogenic liquid. An outer insulating tank is mounted in the vessel and an inner insulating tank is mounted inside the outer insulating tank, with a vacuum layer being interposed between the inner and outer insulating tanks. An inner side of the inner insulated tank, in which the motor and bearings are arranged, is maintained at a room temperature, with a tip portion of the inner insulating tank being formed into an outer case extending into a cryogenic region outside of the outer insulated tank.

Cryogenic liquefied pump system

A turbomolecular pump including a casing stationary blades arranged in a plurality of stages in the casing axially thereof, rotating blades arranged between the stationary blades and located on an outer periphery of a rotor located in a central portion of the casing, and a bearing device journaling the rotor at its high vacuum and end a low vacuum end. A first permanent magnet of the fixed side having a high Curie point and a second permanent magnet of the rotor side located in juxtaposed relation to the first permanent magnet constitute a magnetic bearing of an attraction type for journaling the rotor at its high vacuum end. A pivot type hydrodynamic bearing or active magnetic bearings journal the rotor at its low vacuum end.

Turbomolecular pump

Growing community of inventors

Ushiku, Japan

Nobuo Tsumaki