Kyoto University

Nobuo Satoh

Hirofumi Yamada

Kazumi Matsushige

Kei Kobayashi

Kenjiro Kimura

Takashi Horiuchi

Akifumi Nakai

Eika Tsunemi

Above a sample () having magnetic domains, a distribution of magnetic force in a measurement plane () is obtained as a magnetic force image using a MFM, an auxiliary magnetic force image is obtained by performing measurement in a measurement plane () away from the measurement plane () by a distance d, and a difference between them is divided by the distance d to obtain a magnetic force gradient image. The magnetic force image and the auxiliary magnetic force image are Fourier transformed and substituted into a three-dimensional field obtaining equation derived from a general solution of the Laplace equation, and the three-dimensional field indicating the magnetic force is obtained. A state of the magnetic domains at the surface () of the sample () can be obtained with high accuracy by obtaining the three-dimensional field.

Apparatus and method of obtaining field by measurement

Incident lightemitted from a laser light sourceis reflected on an upper surface of a cantilever, so that reflected lightenters light detection means. Since the incident lightand the reflected lightare in a plane not including a long axis of the cantilever, movements of the reflected lightdue to change in a deflection amount &#x3b8; of the cantileverand due to change in a fine vertical movement amount z thereof are different in direction on the light detection means. This enables the change in the deflection amount &#x3b8; of the cantileverand the change in the fine vertical movement amount z thereof to be separated from output of the light detection means

Method for processing output of scanning type probe microscope, and scanning type probe microscope

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Kyoto, Japan

Nobuo Satoh