Azbil Corporation

Yamatake Corporation

Nobuo Sashinami

Takashi Masuda

Takuya Ishihara

Hiroyuki Hamano

Kouichi Koizumi

In an electrostatic capacitance pressure sensor provided with a pressure sensor chip of a diaphragm structure for detecting an electrostatic capacitance in accordance with a pressure of a medium to be measured, one face of a sensor diaphragm of the pressure sensor is a pressure introduction chamber side wherein the medium to be measured is introduced, and the other face is a capacitor chamber side wherein a capacitor portion is formed, where, in the sensor diaphragm, the rigidity is lower towards a center portion from a peripheral edge portion that is a boundary of diaphragm securing portions on the capacitor chamber side.

Electrostatic capacitive pressure sensor

A sensor includes a sensor main body, first and second electrodes, an electrode extraction hole, and an interconnection member. A cavity is formed in the sensor main body by joining the outer peripheral portions of the first and second substrates made of an insulating material. The first and second electrodes are formed on the inner surfaces of the first and second substrates which face each other through the cavity. The electrode extraction hole is formed through the first substrate in correspondence with the second electrode. The interconnection member guides the second electrode outside the first substrate through the cavity and the electrode extraction hole. The interconnection member is formed by thermal spraying of metal powder into the cavity from outside the sensor main body through the electrode extraction hole. An electrode extraction structure and electrode extraction method are also disclosed.

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Tokyo, Japan

Nobuo Sashinami