Rigaku Industrial Corporation

Nobuo Ohtsuki

Tadashi Utaka

Eiji Yamada

An X-ray Spectroscope comprising a pair of soller slits disposed such that one end of each faces an X-ray emitting portion of a sample, a pair of total reflection mirrors disposed such that one end of each face the other end of the respective soller slits and that the reflecting surfaces thereof face each other and make a predetermined angle with respect to X-rays passed through the respective soller slits and an X-ray detector disposed at a position, at which X-rays reflected by the total reflection mirrors intersect each other. If necessary, it further provides a pair of auxiliary soller slits between the X-ray detector and the total reflection mirrors and a filter capable of absorbing only characteristic X-rays from a particular substance. Such an X-ray spectroscope has an extremely improved efficiency of detection compared to the conventional spectroscope of this kind and can also permit size reduction of the entire device.

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Ibaraki, Japan

Nobuo Ohtsuki