Jeol Ltd.

Tohoku University

National Institute of Advanced Industrial Science

National Institute of Advanced Industrial Science and Technology

Nobuo Handa

Hideyuki Takahashi

Takanori Murano

Masami Terauchi

Ayumi Morioka

Akira Kurokawa

Satoru Akai

Kazuhiro Kumagai

A lower-side structure forms a specimen chamber in which a specimen base is provided. An upper-side structure forms a nozzle chamber above the specimen chamber. The specimen chamber and the nozzle chamber are separated by a gate valve. In the nozzle chamber, at least a tip opening of a nozzle that ejects a specimen is present. A control device maintains a relationship of gas pressures such that a gas pressure in the specimen chamber is higher than a gas pressure in the nozzle chamber when the lower-side structure and the upper-side structure are in communication with each other.

Specimen preparation apparatus

An X-ray detection system has an electron beam irradiation portion, a diffraction grating, a splitter for distributing the direction of propagation of the diffracted X-rays such that an imaging plane for the diffracted X-rays is assigned to plural positions spaced apart in a direction perpendicular to the direction of energy dispersion of the diffracted X-rays, and image sensors different in energy sensitivity disposed respectively at the positions to which the imaging plane is assigned.

X-ray detection system

Growing community of inventors

Tokyo, Japan

Nobuo Handa