Shin-etsu Chemical Co., Ltd.

Tokyo Electoron Limited

Nobuo Arai

Shoji Kano

Junichi Arami

Nobuo Kawada

Kenji Ishikawa

Ryouji Iwai

Koji Hagiwara

There is disclosed a heating apparatus with electrostatic attraction function, comprising at least a supporting base, an electrode for electrostatic attractionand a heating layerthat are formed on the supporting base, and an insulating layerthat is formed on the electrode for electrostatic attraction and the heating layer, wherein the electrode for electrostatic attraction and/or the heating layer are/is composed of pyrolytic graphite containing boron and/or boron carbide of 0.001-30% by weight in terms of boron concentration, and the insulating layer has an electric resistivity of 10-10&#x3a9;cm. There is provided a heating apparatus with electrostatic attraction function, which has a high thermal shock resistance, no problem of delamination, a proper resistance value, and a sufficient electrostatic attraction force even in a medium and high temperature range of 500-800&#xb0; C., which causes no breakage of devices due to leakage current, and which can be used stably during rapid rise and rapid drop in temperature.

Heating apparatus with electrostatic attraction function

A ceramic electrostatic chuck with a built-in heater having electrodes of an electroconductive ceramic bonded to a surface of a supporting substrate of an electrically conducting ceramic. A heat generating layer of an electroconductive ceramic is bonded to the other surface of the supporting substrate and a covering layer of an electrically insulating ceramic is provided thereon. Each of the supporting substrate, electrode for the electrostatic chuck and heat generating layer has a surface roughness Rmax of 5 .mu.m or larger.

Ceramic electrostatic chuck with built-in heater

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Gunma-ken, Japan

Nobuo Arai