Super Silicon Crystal Research Institute Corp.

Silicon Crystal Research Institute Corp.

Nobumitsu Takase

Yutaka Shiraishi

Tomohisa Machida

The present invention aims to prevent solidification of a melt in a feeding pipe without providing heating means such as heater or heat keeping means such as heat insulating material on outer periphery of the feeding pipe when the melt is supplied from an auxiliary crucible into a main crucible via the feeding pipe by overflow. At the center of the auxiliary crucible made of quartz, a pipe for feeding the melt from the auxiliary crucible to the main crucible by overflow is formed. When the raw material in the auxiliary crucible is melted, it is designed in such manner that the raw material is not continuously supplied to the auxiliary crucible but it is supplied in such quantity that the melt overflows intermittently into an opening on the upper end of the pipe from the auxiliary crucible into the main crucible

Single crystal material supplying apparatus and single crystal material supplying method

The present invention aims to improve thermal efficiency and to reduce melting time when a raw material in an auxiliary crucible is heated and melted by induction heating method. When an initial raw material is at low temperature and its conductivity is relatively low, a conductive carbon cylinder is arranged at such a height as to cover the entire side wall of the auxiliary crucible , and when high frequency current is applied on a high frequency coil , secondary induction current is generated on the carbon cylinder . Then, Joule heat is generated on the carbon cylinder by the secondary induction current, and heat of the carbon cylinder is transmitted to the raw material inside via the auxiliary crucible . Thus, the raw material is heated, and melting is started. When the raw material is melted, an insulating ceramic base is arranged at such a position as to cover the entire side wall of the auxiliary crucible . Because conductivity of the raw material is gradually increased, secondary induction current is generated in the melt , and Joule heat is generated in the melt itself by the secondary induction current.

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Annaka, Japan

Nobumitsu Takase