Fujikin Inc.

Other

Tokyo Electron Limited

Tohoku University

Tokushima University

Tadahiro Ohmi

Tokyo Electron Limi Ted

Nidec Copal Electronics Corporation

Kabushiki Kaisha Ultraclean Technology Research Institute

Fujilin Incorporated

Fujiken, Inc.

Ohmi,tadahiro, Miyagi

Japan Scientific Engineering Co., Ltd.

Fujkin Incorporated

Hitachi, Ltd.

Nobukazu Ikeda

Kouji Nishino

Ryousuke Dohi

Masaaki Nagase

Michio Yamaji

Kaoru Hirata

Katsuyuki Sugita

Akihiro Morimoto

Yukio Minami

Tsutomu Shinohara

Keiji Hirao

Atsushi Hidaka

Takashi Hirose

Yohei Sawada

Tomio Uno

Koji Kawada

Kazuhiko Sugiyama

Eiji Ideta

Atsushi Matsumoto

Hiroshi Morokoshi

Ryosuke Dohi

Hiroyuki Fukuda

Osamu Nakamura

Takatoshi Nakatani

Kazuteru Tanaka

Toshihide Yoshida

Naofumi Yasumoto

Satoru Yamashita

Satoshi Kagatsume

Teruo Honiden

Katunori Komehana

Kouji Kawada

Jun Hirose

Tetsuya Kojima

Yoshihiro Deguchi

Masahiko Takimoto

Ryutaro Nishimura

Toyomi Uenoyama

Kazuhiro Yoshikawa

Shinya Ogawa

Masafumi Kitano

Koji Nishino

Hisashi Tanaka

Touru Hirai

Yoshikazu Tanabe

Yasuyuki Shirai

Tadayuki Yakushijin

Hiroshi Koizumi

Kazuyuki Miura

Hideki Nagaoka

Shigeaki Tanaka

Tomokazu Imai

Kazuyuki Morisaki

Naoya Masuda

Shoichi Hino

Shigeru Itoi

Yuji Kawano

Kosuke Yokoyama

Tsuyoshi Shimazu

Masayuki Hatano

Masaharu Taguchi

Masayoshi Kawashima

Kenji Yamamoto

Keisuke Ideguchi

Takahiro Imai

Eiji Takahashi

Migaku Takahashi

Takahisa Nitta

Wataru Okase

Shuji Moriya

Tsuyoshi Tanikawa

Hirofumi Kitayama

Mutsunori Koyomogi

Kazuo Fukasawa

Kunio Nagai

Hiroyuki Ito

Shigetoshi Sugawa

Takeshi Nakamura

Norihiko Amikura

Takahiro Matsuda

Atsushi Sawachi

Akihiro Harada

Rihito Kuroda

Ryutaro Tanno

Kohei Shigyou

Yohei Uchida

Nobuhiro Miki

Risako Miyoshi

Kenji Tsubota

Ichiro Tokuda

Kazuyuki Tezuka

Keiko Hada

Norikazu Sasaki

A concentration measurement devicefor measuring the concentration of the a gas flowing through a junction blockconnected to a plurality of gas supply lines includes a light sourcefor generating light incident to a flow path formed in the junction block, a photodetectorfor receiving light emitting from the flow path, and an arithmetic control circuitfor determining the concentration of the gas flowing through the flow path based on the output of the photodetector, translucent incident windowsandfor making light from the light source incident to the flow path and, at least one of the translucent emitting windowsandfor emitting light passing through the flow path being sealed and fixed to the junction block

Concentration measurement device

A cover componentis used for a pressure sensorthat is fixed to a mounting surfaceS of a bodywith a flow path Fformed therein, and that has protrudes protruding from the mounting surfaceS, the cover component comprising a hollow memberhaving an inner peripheral surface facing a side surface of the protruding portion of the pressure sensor, and a cover memberfixed to the hollow memberand covering the protruding portion of the pressure sensor

Cover component for pressure sensor, and pressure sensor device comprising same

A controller capable of improving the disappearance resistance of a synthetic resin coating of a diaphragm, and a vaporization supply device comprising the controller. The controller includes a body having an inflow passage and an outflow passage, a valve seat provided between the inflow passage and the outflow passage, a diaphragm capable of being seated on or separated from the valve seat, and an actuator for causing the diaphragm to be seated on and separated from the valve seat. The material of the valve seat is nickel-based, and the diaphragm is provided with a synthetic resin coating on a surface of a side to be brought into contact with the valve seat.

Controller and vaporization supply device

[Problem] The main purpose of the present invention is to provide a casing for a fluid controller capable of enabling maintenance inside the casing even in a state where the lower part of the casing is fixed to a main body of a fluid controller, and improving maintainability. [Solution] A casingfor covering deviceson a main bodyof a fluid controller, the casingis configured so as to be dividable into a plurality of parts, and the plurality of parts comprising a first partprovided with a fixing portionfor fixing to the main body, a second partattached to the first part, and a third partattachably and detachably provided at an upper partition higher than a predetermined height position of the casing

Casing for fluid controller and fluid controller provided with same

The flow rate control deviceincludes a control valve, a restriction partprovided downstream of the control valve, an upstream pressure sensorfor measuring a pressure Pbetween the control valveand the restriction part, a differential pressure sensorfor measuring a differential pressure ΔP between the upstream and the downstream of the restriction part, and an arithmetic control circuitconnected to the control valve, the upstream pressure sensor, and the differential pressure sensor

Flow rate control device

The concentration measurement deviceincludes an electric unithaving a light sourceand a photodetector, a fluid unithaving a measurement cell, a first light-transmission memberfor transmitting light from the light source to the measurement cell, a second light transmission memberfor transmitting light from the measurement cell to the photodetector, a lensA provided in the fluid unit, the lensA being arranged such that light from the first light transmission member is to be incident on the first position and light is to be emitted from the second position to the second light transmission member, a pressure sensorfor measuring pressure of fluid flowing through the measurement cell, and an arithmetic circuitfor detecting concentration of the fluid flowing through the measurement cell, the arithmetic circuit being configured to calculate the fluid concentration based on the output of the photodetector and a correction factor related to the pressure output by the pressure sensor and the concentration of fluid in order to reduce the measurement error due to the refractive index of the fluid.

Density measurement device

A concentration measurement method performed in a concentration measurement device including an electric unit having a light source and a photodetector, a fluid unit having a measurement cell through which a gas flows, and a processing circuit for calculating a concentration of the gas based on an intensity of a light passing through the measurement cell. The concentration measurement method includes a step of determining an absorption coefficient of the measurement gas using a reference absorption coefficient determined in association with the reference gas and a correction factor associated with the measurement gas, and a step of obtaining a concentration of the measurement gas flowing in the measurement cell using the absorption coefficient of the measurement gas. When the absorption peak wavelength of the measurement gas is longer than the peak wavelength of the light source, a reference gas having a longer absorption peak wavelength than the peak wavelength of the light source is used, and when the absorption peak wavelength of the measurement gas is shorter than the peak wavelength of the light source, a reference gas having a shorter absorption peak wavelength than the peak wavelength of the light source is used.

Concentration measuring method, and concentration measuring device

The driving device includes a piezoelectric element, a power supply unit, a first resistor, a second resistor, a measuring unit and a control unit, wherein resistance values of the first resistor and the second resistor are smaller than an insulating resistance value of the piezoelectric element, the measuring unit measures, a voltage across the first resistor (voltage between a first terminal and a second terminal), in a state of supplying a predetermined voltage from the power supply unit, and the control unit calculates a resistance value of the piezoelectric element from a voltage value obtained by the measurement of the measuring unit, and determines, whether or not degradation has occurred in the piezoelectric element based on the calculated resistance value.

Driving device provided with piezoelectric element deterioration detection circuit and deterioration detection method

An abnormality detection method is performed in a gas supply system including a flow rate control device having a restriction part, a control valve, a flow rate control pressure sensor for measuring upstream pressure, and a control circuit. The inflow pressure sensor measures the supply pressure. An upstream on/off valve is provided upstream of the inflow pressure sensor. The method includes closing the upstream on/off valve when the gas flows at a controlled flow rate at the downstream of the restriction part by controlling an opening degree of the control valve based on the output of the flow rate control pressure sensor; measuring a drop in supply pressure on the upstream side of the control valve after closing the upstream on/off valve while keeping the control valve open; and detecting the presence or absence of abnormality in the flow rate control device based on the measured supply pressure drop.

Abnormality detection method for flow rate control device, and flow rate monitoring method

A diaphragm valve includes a body () having a flow path (), a seat () formed in the flow path (), a metal diaphragm () for opening and closing the flow path (), a pair of clamping parts () and () for claiming peripheral edge portions of the metal diaphragm () to fix the metal diaphragm () to the body (), and an actuator () for abutting the metal diaphragm () to the seat () or separating the metal diaphragm from the seat (), wherein a fluorine resin coating is formed on a seat side surface () of the metal diaphragm () at least in a contact region (B-A) with the seat () in a region (C) surrounded by a clamping region (D-C) between the seat side surface () and one of the pair of clamping portions (), excluding the clamping region (D-C).

Diaphragm valve

A Concentration measurement devicecomprises: a measurement cellhaving a flow path through which a gas flows, a light sourcefor generating incident light to the measurement cell, a photodetectorfor detecting light emitted from the measurement cell, a pressure sensorfor detecting a pressure of the gas in the measurement cell, a temperature sensorfor detecting a temperature of the gas in the measurement cell, and an arithmetic circuitfor calculating a concentration of the gas based on an output P of the pressure sensor, an output T of the temperature sensor, an output I of the photodetector, and an extinction coefficient &#x3b1;, wherein the arithmetic circuitis configured to calculate the concentration using the extinction coefficient &#x3b1; determined on the basis of the output of the temperature sensor

A pressure sensor includes a cylindrical member configured to be attached to a body having a fluid passage, and a pressure sensor unit connected to the cylindrical member for detecting a pressure of a fluid flowing through the fluid passage, wherein the cylindrical member is made of a nickel-molybdenum-chromium alloy material or a stainless steel material, wherein the pressure sensor unit includes a sensor body closed at one end with a diaphragm and a pressure detecting element for outputting displacement of the diaphragm as pressure, and wherein the sensor body is made of a cobalt-nickel alloy material, and is connected at an opening side end portion to one end portion of the cylindrical member.

Diaphragm type pressure sensor arrangement having corrosion resistance and yield strength

The concentration measurement deviceincludes an electric unithaving a light sourceand a photodetector, a fluid unithaving a measurement cell, optical fibersandfor connecting the electric unitand the fluid unitand is configured to measure the concentration of the fluid in the measurement cell by detecting the light incident from the light sourceto the measurement cell and then emitted from the measurement cell by the photodetector, where optical connection partsandconnected to the optical fibersand the light sourceor the photodetectorare integrally provided in the electric unit

A concentration measurement deviceincludes a light sourcefor generating incident light to a measurement spaceA, a photodetectorfor receiving light emitted from the measurement space, and an arithmetic control circuitfor calculating a concentration of a measurement fluid on the basis of an output of the photodetector, and the light source includes a first light-emitting elementfor generating light having a first wavelength, and a second light-emitting elementfor generating light having a second wavelength, and the concentration measurement device is configured so as to calculate the concentration using either light of the first wavelength or the second wavelength on the basis of the pressure or temperature of the measurement fluid.

Growing community of inventors

Osaka, Japan

Nobukazu Ikeda