Valqua, Ltd.

Applied Materials, Inc.

Nippon Valqua Industries, Ltd.

Nobuhiro Yoshida

Ippei Nakagawa

Sangho Kim

Yong-Gu Kang

Hamid Noorbakhsh

Kazuaki Tsuji

Tsutomu Yoshida

Masamichi Iwaki

Michi Kuroda

Sang Ho Kim

Masayuki Noguchi

Hiromi Kinoshita

Masato Hamade

Tamotsu Matsumura

Composite seal for semiconductor manufacturing device

A seal member includes a bottom portion, a first side wall portion, a second side wall portion, and an outer wall portion. At least one of the first side wall portion and the second side wall portion is provided to be outwardly widened from the bottom portion toward the outer wall portion with respect to a virtual plane perpendicular to an axis. The outer wall portion has a recessed portion recessed toward a bottom portion side, between the first side wall portion and the second side wall portion, and the outer wall portion forms a first lip region in a region including the first side wall portion, and forms a second lip region in a region including the second side wall portion, with the recessed portion being sandwiched therebetween.

Seal member

Provided is a composite seal member that can maintain performance such as vacuum seal performance, plasma resistance, and corrosive gas resistance over a long period. The composite seal member is mounted in a seal groove provided in a body surface of a first member, and establishes a sealed state between the first member and a second member when the second member is moved closer toward the first member. The composite seal member includes a first seal member disposed on the side of a first side wall of the seal groove and made of an elastic member, and a second seal member disposed on the side of a second side wall of the seal groove and made of a material that is harder than the first seal member. The second seal member has at least a second side wall abutment surface that extends generally in parallel with and makes surface contact with the second side wall of the seal groove, and a seal abutment surface that extends generally in parallel with a seal surface of the second member, and that makes surface contact with the seal surface of the second member in the sealed state.

Composite seal member

Provided are a laminate including a metal substrate having a surface with an anodic oxide coating formed thereon, a fluororesin layer laminated in contact with the anodic oxide coating and a fluoroelastomer layer laminated in contact with a surface of the fluororesin layer facing away from the metal substrate, and a gate seal including the laminate.

Growing community of inventors

Gojo, Japan

Nobuhiro Yoshida