Other

Takasago Netsugaku Kogyo Kabushiki Kaisha

Nobuhiro Konishi

Tadahiro Ohmi

Tadashi Shibata

Takashi Imaoka

Takeo Yamashita

Masakazu Nakamura

Hisayuki Shimada

Mizuho Morita

Hidetoshi Wakamatsu

Jinzo Watanabe

Shintaro Aoyama

A method of forming an oxide film having high insularity capability is performed within an ultra clean environment, using charged particles.

Oxide film forming method

Vacuum processing equipment capable of preventing particles from sticking to objects to be processed in vacuum vessels. The vacuum equipment comprises a series of vacuum vessels separated by doors, and the pressure in the vessels are reducible respectively. The vessels are so configured that objects to be processed are movable among them, and there is provided light projection means for projecting ultra rays on gases introduced to at least of the vessels.

Growing community of inventors

Sendai-shi, Miyagi-ken, Japan

Nobuhiro Konishi