Murata Manufacturing Co., Ltd.

Murata Manufacturingco., Ltd.

Nobuhira Tanaka

Daisuke Kondo

Masaaki Fujisaki

Yutoku Kawabata

Hiroyuki Yokoi

Kiyoshi Kurihara

Kenjiro Okaguchi

Hiroaki Wada

Hiroshi Takemura

Hiroki Achiwa

Masahiro Sasaki

Masashi Omura

Hisashi Yamazaki

Yoshinori Ando

Daisuke Yamamoto

An actuator includes a frame, a central flat plate and connecting members. The frame has a regular square opening. The central flat plate has a circular shape and is disposed inside the regular square opening. A driving device is attached to the central flat plate. The connecting members are disposed inside the regular square opening at a position between the central flat plate and the frame. The connecting members connect the central flat plate and the frame. Each connecting member includes a first portion and a second portion. The first portion extends in a radial direction extending outward from the center of the central flat plate. The first portion is connected to the central flat plate and to the second portion. The second portion extends in a direction different from the extending direction of the first portion.

Actuator and fluid control apparatus

A fluid control device includes a fluid conveying element formed by a pump and a valve, and an outer housing containing the fluid conveying element. The outer housing includes a first outer wall forming an internal space closer to the pump, and a second outer wall forming an internal space closer to the valve. The second outer wall includes an outer-wall main plate having a part overlapping, in plan view, a through hole that is a discharge hole of the valve. A thermal conductivity of the part of the outer-wall main plate overlapping the discharge hole is higher than a thermal conductivity of the first outer wall.

Fluid control device

A first main plate has a first principal surface and a second principal surface. A second main plate has a third principal surface, a fourth principal surface, and an aperture. A piezoelectric element is provided on the first main plate and vibrates the first main plate. A first frame is disposed outside an outer peripheral end of the first main plate. First connecting portions connect the first main plate and the first frame to each other. Apertures are formed between the first connecting portions and connect a space adjacent to the first principal surface and a space adjacent to the second principal surface to each other. The second frame is disposed outside an outer peripheral end of the first frame. A second connecting portion connects the first frame and the second frame to each other.

A fluid control device has a housing. A first main plate of the housing includes a vibration portion, on which a drive body is disposed, having a rotationally symmetric shape in plan view, and multiple openings which is formed outside the vibration portion and through which a pump chamber and the outside communicate with each other. A second main plate includes an opening through which the pump chamber and the outside communicate with each other and which has a rotationally symmetric shape in plan view. The opening is arranged to include the center of the vibration portion in plan view of the first main plate and the second main plate. An opening area of the opening is from 10% to 75% of an area of the vibration portion.

A fluid control device includes a first main plate, a second main plate, a driving body, a frame body, a plurality of support bodies, a plurality of gaps, a side wall member, a valve film, and a fixing member. A pump chamber is formed by a flat plate part consisting of the first main plate, the frame body, and the plurality of support bodies, and the second main plate and the side wall member. The valve film is disposed on a main surface of the first main plate on the side where the pump chamber is located. The valve film has an annular shape and fixed to the first main plate by the fixing member so that an outer end thereof is a movable end. The outer end of the valve film overlaps the plurality of gaps located between the plurality of support portions in plan view.

A fluid control device includes: a first flat plate; a frame disposed outside an outer peripheral end of the first flat plate via openings; a connection member connecting the first flat plate and the frame; a plate member having through holes in a portion facing the first flat plate; and a valve member configured to rectify a fluid flow. An outer end of the valve member projects toward an outside of the outer peripheral end of the first flat plate. A portion of the valve member closer to an inner end thereof located closer to a center of the first flat plate is fixed to the first flat plate. The outer end of the valve member is not fixed. The valve member has a first portion closer to the outer end, and a second portion closer to an inner end of the first portion.

A fluid control apparatus includes a first major plate, a piezoelectric device, a second major plate, a peripheral plate, a first film, and a second film. The first film is provided on a side of the first major plate that faces a pump chamber. The first film is provided on a first major surface in such a manner as to have a movable portion one end of which serves as a movable end. The second film is provided on a side of the second major plate that faces the pump chamber. The second film is provided on a third major surface in such a manner as to have a movable portion one end of which serves as a movable end. The first film and the second film are positioned between a first opening provided in the first major plate and a second opening provided in the second major plate.

Fluid control apparatus

A fluid control device includes a piezoelectric pump having a piezoelectric element, a driving circuit that receives a driving power supply voltage applied thereto and drives the piezoelectric element, and a startup circuit disposed between the driving circuit and an input terminal for a power supply voltage. The startup circuit increases the driving power supply voltage to a voltage (V) lower than a constant voltage (Vc) in a first stage (P) after startup, maintains or decreases the driving power supply voltage in a second stage (P) following the first stage (P), and increases the driving power supply voltage to the constant voltage (Vc) in a third stage (P) following the second stage (P).

A first power supply member and a second power supply member are arranged on the same side of a first member in a thickness direction of an actuator. The first power supply member includes a first external connection terminal. The second power supply member includes a second external connection terminal. The first external connection terminal and the second external connection terminal are arranged on the same positions in the thickness direction. A second insulating layer is arranged between the second power supply member and a frame body. A far end side portion on an opposite side to a side, on which the first external connection terminal protrudes, in the first power supply member is bent toward the frame body to be electrically connected with the frame body.

Actuator, fluid control device, and actuator manufacturing method

A fluid control apparatus includes a valve and a pump. The valve has a valve chamber surrounded by the first main plate, the second main plate, and the side plate. The first main plate has a first aperture, and the second main plate has a second aperture. The valve further includes a valve diaphragm disposed inside the valve chamber. The valve diaphragm is configured to switch between a state in which the first aperture and the second aperture communicate with each other and a state in which the first aperture and the second aperture do not communicate with each other. The pump includes a vibration unit that has a piezoelectric device and a vibrating plate. The pump has a pump chamber that is defined by the vibration unit and the second main plate. The pump chamber communicates with the valve chamber through the second aperture.

A pump includes a vibrating plate, a flow path forming member, a pump chamber, and a film valve. The vibrating plate is provided with a piezoelectric element, vibrates due to distortion of the piezoelectric element, and has a gap on an outer periphery. The flow path forming member is disposed so as to face the vibrating plate, and has a hole in a portion facing the vibrating plate. The pump chamber is surrounded by the vibrating plate and the flow path forming member, and has a central space communicating with the hole and an outer edge space communicating with the gap. The film valve is disposed in the pump chamber. The film valve is in contact with the vibrating plate and the flow path forming member when a pressure in the central space is lower than a pressure in the outer edge space.

Pump

A valve includes a first plate having a first vent hole; a second plate defining a valve chamber, which communicates with the first vent hole, between the second plate and the first plate, the second plate having a second vent hole that communicates with the valve chamber and that does not face the first vent hole; and a movable plate having a third vent hole that faces the second vent hole and disposed in the valve chamber such that the movable plate is movable between the first plate and the second plate. The second plate has an auxiliary hole that does not face the third vent hole in the movable plate, the auxiliary hole being surrounded by an edge portion that forms a first corner portion having a substantially convex rounded shape in front view of a principal surface of the second plate at a side facing the valve chamber.

Valve and fluid control device including valve

The present disclosure includes: a vibrating plate having a piezoelectric body connected to a main surface thereof; a cover including a top plate that faces another main surface of the vibrating plate and that has an opening part, and a side wall connected to an outer peripheral portion of the top plate so as to surround a space between the top plate and the vibrating plate; a support portion connected to the side wall and supports an outer periphery of the vibrating plate; an opening between the side wall and the vibrating plate; and a protrusion on any one out of the top plate, the side wall, and the vibrating plate so as to protrude into the space. The protrusion is provided between the opening part of the top plate and the side wall in a cross section.

Piezoelectric pump with vibrating plate, protrusion and valve arrangement

A fluid control device () includes a pump (), a container () that is pressurized or decompressed by the pump (), a valve () that allows communication between the container () and an outside of the container () when the valve () is in an opened state, and a controller () that controls the pump () and the valve (). The controller () pressurizes or decompresses the container () by closing the valve () and driving the pump () and then cools down the pump () by opening the valve () and driving the pump (). Accordingly, an increase in the temperature of the pump can be reduced, and convenience of the fluid control device can be improved.

Fluid control device and sphygmomanometer

A piezoelectric pump includes a first top board, a second top board, a diaphragm, a first side wall, a second side wall, a first valve, and a second valve. The first valve has an annular shape to surround the first aperture while being spaced apart from the first aperture and the second aperture, and is disposed in the first pump chamber between the first aperture and the second aperture when viewed in a plan. The second valve has an annular shape to surround the third aperture while being spaced apart from the third aperture and the fourth aperture, and is disposed in the second pump chamber between the third aperture and the fourth aperture when viewed in a plan.

Growing community of inventors

Kyoto, Japan

Nobuhira Tanaka