Nagano Keiki Co., Ltd.

Denso Corporation

Nobuaki Yamada

Shuji Tohyama

Takayuki Yokoyama

Yukinobu Iimori

Naoki Yoshida

Inao Toyoda

Hiroshi Kodama

Kenichi Yokoyama

Eiji Takeda

Yoshihiro Tomomatsu

Hisayuki Takeuchi

Naohisa Niimi

Kaori Miyashita

Yusuke Midorikawa

Yukihiro Kamada

Kouji Asano

Shirou Kamanaru

Masao Takahashi

Yasushi Yanagisawa

Yasutake Ura

A pressure sensor has a stem in which a pressure introduction hole into which a pressure medium is introduced and a diaphragm deformable according to the pressure of the pressure medium are formed, and a strain detecting element which is arranged on the diaphragm via an insulating film and being configured to output a detection signal according to the deformation of the diaphragm. The strain detecting element is configured to have a portion made of polysilicon. A low doping layer having a higher electrical resistivity than polysilicon and a higher crystallinity than the insulating film is arranged between the insulating film and the strain detecting element.

Pressure sensor

A pressure sensor includes: a pressure sensor element; a metal adapter integrally attached to the pressure sensor element and defining therein a hole through which a pressure of a fluid to be measured is introduced to the pressure sensor element; a metal fitting member provided with a housing recess receiving the adapter and connectable to a connected member; and an operation member pressing a valve provided to the connected member and defining a communicating path through which a flow path, in which the pressure of the fluid to be measured is introduced, is in communication with the hole of the adapter. The adapter and the fitting member are connected to each other by plastic deformation. The operation member is a synthetic resin member including: a contact portion brought into contact with the adapter; and a pressing portion provided on a side opposite to the contact portion to press the valve.

Pressure sensor with plastically deformable connection

A pressure sensor includes: a pressure sensor element; an adapter integrally attached to the pressure sensor element and defining therein a hole where a pressure of a fluid to be measured is introduced to the pressure sensor element; a fitting member having a housing recess housing the adapter and connectable to a connected member; and a pressing member pressing a valve of the connected member and defining a communicating path through which a flow path where the pressure of the fluid is introduced is in communication with the hole of the adapter. The fitting member is made of a synthetic resin. An O-ring is interposed between a circumferential surface of the adapter and the fitting member. The adapter is a synthetic resin member, and includes a contact portion brought into contact with the adapter and a pressing portion pressing the valve. The pressing member is welded to the fitting member.

A cap is provided on a diaphragm, and a first end of a flexible board is connected to the cap. A cover is attached to the cap. The cover directs a second end of the flexible board in a direction away from the diaphragm held by a joint so that the flexible board is supported while being curved. Since the flexible board is not locally bent at an acute angle, a crack is not generated on a copper pattern provided on the flexible board.

Flexible board sensor and manufacturing method of sensor

A pressure sensor is provided with a cap on a measuring portion of a diaphragm to which a first end of a flexible board is connected while a second end of the flexible board is connected to a circuit board spaced apart from the diaphragm. The flexible board is provided with the first end, a belt portion that is bent at an angle of ninety degrees or more relative to the first end in a direction to be away from the circuit board and is curved along the outer circumference of the diaphragm, and the second end that is bent at an angle of ninety degrees or more relative to the belt portion to be connected to the circuit board.

Sensor and manufacturing method of sensor

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Tokyo, Japan

Nobuaki Yamada