Kioxia Corporation

Toshiba Memory Corporation

Nobuaki Okada

Hiroshi Maejima

Tetsuaki Utsumi

Hiroshi Nakamura

Katsuaki Isobe

Toshiki Hisada

Takahiro Tsurudo

Hiroyuki Takenaka

Yoshiaki Takahashi

Masaki Unno

According to one embodiment, a device includes a first chip including a first via in a first surface; and a second chip including a second via in a second surface and overlapping the first chip in a direction perpendicular to the first surface. The first via includes a first side along a second direction parallel to the first surface, and a second side along a third direction parallel to the first surface, the second via includes a third side along the third direction and a fourth side along the second direction, a dimension of the first side is larger than a dimension of the second side, a dimension of the third side is larger than a dimension of the fourth side. The first via is in contact with the second via so that the first side intersects the third side.

Semiconductor device

A semiconductor memory device comprises a first chip and a second chip bonded via bonding electrodes. The first chip comprises a semiconductor substrate. The second chip comprises: first conductive layers; semiconductor layers facing the first conductive layers; a first wiring layer including bit lines; a second wiring layer including wirings; and a third wiring layer including first bonding electrodes. The wirings each comprise: a first portion provided in a region overlapping one of the bit lines, and is electrically connected to the one of the bit lines; and a second portion provided in a region overlapping one of the first bonding electrodes, and is connected to the one of the first bonding electrodes. At least some of these wirings comprise a third portion connected to one end portion in a second direction of the first portion and one end portion in the second direction of the second portion.

Semiconductor memory device

A semiconductor memory device according to an embodiment includes a substrate, a first memory cell, a first bit line, a first word line, a first transistor, and a second transistor. The first memory cell is provided above the substrate. The first bit line extends in a first direction. The first bit line is coupled to the first memory cell. The first word line extends in a second direction intersecting the first direction. The first word line is coupled to the first memory cell. The first transistor is provided on the substrate. The first transistor is coupled to the first bit line. The second transistor is provided below the first memory cell and on the substrate. The second transistor is coupled to the first word line.

According to one embodiment, a semiconductor device includes a semiconductor layer, an element region provided on the semiconductor layer convexly, having a predetermined width in a first direction along a surface of the semiconductor layer, and extending in a second direction along the surface of the semiconductor layer and intersecting the first direction, a gate electrode arranged above the element region, a liner layer covering the gate electrode, and an element separation portion extends in the second direction on both sides of the element region in the first direction, and the liner layer continuously extends from the gate electrode to the element separation portion and the liner layer in the element separation portion lies below the element separation portion.

Semiconductor device, semiconductor storage device, and method of manufacturing semiconductor device

A semiconductor storage device includes first and second chips and first and second power supply electrodes. The first chip includes conductive layers arranged in a first direction, a semiconductor pillar extending in the first direction and facing the conductive layers, first contacts extending in the first direction and connected to the conductive layers, second contacts extending in the first direction and connected to a first power supply electrode, third contacts extending in the first direction, facing the second contacts in a direction crossing the first direction, and connected to the second power supply electrode, and first bonding electrodes connected to the first contacts. The second chip includes a semiconductor substrate, transistors provided on the semiconductor substrate, fourth contacts connected to the transistors, and second bonding electrodes connected to the fourth contacts. The first and second chips are bonded together so that respective first and second bonding electrodes are connected together.

Semiconductor storage device

A semiconductor storage device includes first and second chips. The first chip includes a first semiconductor substrate, first conductive layers arranged in a first direction and extending in a second direction, a semiconductor column extending in the first direction and facing the first conductive layers, a first charge storage film formed between the first conductive layers and the semiconductor column, a plurality of first transistors on the first semiconductor substrate, and first bonding electrodes electrically connected to a portion of the plurality of first transistors. The second chip includes a second semiconductor substrate, a plurality of second transistors on the second semiconductor substrate, and second bonding electrodes electrically connected to a portion of the plurality of second transistors, and bonded to the first bonding electrodes. A thickness of the second semiconductor substrate in the first direction is smaller than a thickness of the first semiconductor substrate in the first direction.

Semiconductor storage device with transistors of peripheral circuits on two chips

A semiconductor memory device includes a first block that includes a first set of word lines, a second block that includes a second set of word lines and is adjacent to the first block in a first direction, a first transistor group adjacent to the first and second blocks in a second direction crossing the first direction, and a second transistor group adjacent to the first transistor group in the second direction. Each of the word lines in the first set is electrically connected to a transistor in the first transistor group, and each of the word lines in the second set is electrically connected to a transistor in the first transistor group.

Growing community of inventors

Yokohama Kanagawa, Japan

Nobuaki Okada