Nitto-denko Corporation

Nobuaki Maruoka

Yoshiki Ikeyama

Asuka Onohara

Hirofumi Fujii

Eiji Toyoda

Yoshio Terada

Makoto Namikawa

Naofumi Kosaka

Hitoshi Ishizaka

Daisuke Uenda

Yasuhiro Amano

Jirou Nukaga

Ryota Masuda

Hiroyuki Fujita

Asami Funatsu

Aika Kosaka

Kenichi Eguchi

A gas-permeable filter provided with oil repellency is provided. The gas-permeable filter includes a porous membrane having a surface coated with an oil-repellent agent. The oil-repellent agent includes a linear fluorine-containing hydrocarbon group represented by &#x2014;RCFCHCFor &#x2014;RCF, and the porous membrane is a stretched polytetrafluoroethylene (PTFE) porous membrane. Here, Rand Rare each independently an alkylene group having 1 to 12 carbon atoms or a phenylene group. The gas-permeable filter is provided with oil repellency without significant reduction in gas permeability.

Gas-permeable filter provided with oil repellency

Disclosed is an air-permeable filter with an adhesive layer. This air-permeable filter is imparted with oil repellency and includes: a porous membrane having a surface coated with an oil-repellent agent; and an adhesive layer disposed on the surface. The oil-repellent agent contains a linear fluorine-containing hydrocarbon group represented by (1) &#x2014;RCFCHCFor (2) &#x2014;RCF, where Rand Rare each independently an alkylene group having 1 to 12 carbon atoms or a phenylene group. This air-permeable filter is imparted with oil repellency without significantly reducing its adhesive strength to the adhesive layer.

Oil repellency-imparted air-permeable filter with adhesive layer

A cleaning sheet for cleaning foreign matters away from the interior of the substrate processing equipment is provided. The cleaning sheet includes a cleaning layer having substantially no tackiness and having a tensile modulus of not lower than 0.98 N/mmas determined according to JIS K7127. Alternatively, the cleaning sheet includes a cleaning layer having a Vickers hardness of not lower than 10 MPa.

Cleaning sheet, conveying member using the same, and substrate processing equipment cleaning method using them

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Osaka, Japan

Nobuaki Maruoka