Yamatake Corporation

Yamatake-honeywell Co., Ltd.

Nobuaki Honda

Sachiko Suzuki

Yoshiro Sakai

Masanobu Matsuguchi

Hiroyuki Hara

Masayuki Yoneda

Takeshi Fukiura

Shoji Nagasaki

A micro-mixer of a simple structure suited to form a micro-mixed liquid from two kinds of liquids A and B comprises a plurality of passage modulesstacked and thereby forming a multi-tiered flow passage. Each of the passage modules has a plurality of combining-dividing unitsarranged at regular intervals. Each of the combining-dividing units has two inletsand two outlets. The two outletsof each of the combining-dividing units in each of the stacked passage modules are connected with an inletof a combining-dividing unit and an inletof another combining-dividing unit in its immediate downstream passage module, respectively.

Micromixer

An integrated sensor device having a structure suited for mass production despite of a short lifetime and automatically replaceable, and a measuring system realizing a continuous monitoring at a low cost by using the integrated sensor device are disclosed. The integrated sensor device is constructed into a signal integrated circuit device comprising a sensor unit ( ) for measuring a change in the quantity or concentration of a substance; a control unit ( ) for processing a signal representing the measurement result; and an antenna unit ( ) for transmitting the processed signal to the outside and for receiving an energy necessary for the transmission and the operations of the sensor unit ( ) and the control unit ( ).

Integrated sensor device and measuring system using the same

A semiconductor pressure sensor is presented. The pressure sensor includes a silicon substrate with a diaphragm that produces a distortion depending on the pressure. Strain gauges are provided on the main surface side of the silicon substrate with the diaphragm and are formed by conductive diffusion resistors different from the substrate. A getter is provided on the main surface side of the silicon substrate including the periphery of the strain gauges adjacent to the strain gauges. The getter includes the PN-junction area to which reverse bias is impressed so that the metal impurities of at least an Fe atom that are contained in the silicon substrate may be captured.

Semiconductor pressure sensor with strain gauges formed on a silicon diaphragm

A cylindrical, electrical insulating region is formed in a circuit substrate made of a semiconductor substrate to continuously extend from the upper surface to the lower surface of the semiconductor substrate and be closed in a plane parallel to the surface of the semiconductor substrate. The electrical insulating region is formed by an insulating region made of a heat-resistant insulating material. The insulating region is formed by forming a through hole or trench in the circuit substrate and forming an oxide film or nitride film on the wall surface of the hole or trench or filling it with an insulating material. When the trench is formed, the substrate is thinned by polishing or the like until the trench appears on the upper and lower surfaces of the substrate after the insulating region is formed. The region surrounded by the insulating region functions as an electrode when the conductivity of the region is increased by diffusing an impurity in it.

Circuit substrate, detector, and method of manufacturing the same

A hydrophilic polymer material such as polyvinyl alcohol is formed into a porous film ( ). A film (holding film) ( ) made from a hydrophobic polymer material such as polyvinyl acetate is formed on the inner walls of a large number of pores ( ) formed in the porous film ( ). Lithium chloride ( ) is held in these pores ( ).

Moisture sensitive element and method of manufacturing the same

A moisture sensitive element in which a functional film is formed in contact with opposing electrodes arranged on a substrate. The element includes a mechanism for measuring the temperature of the functional film. The functional film has a porous structure made from a polymer material with hydrophilic properties and includes fine pores. A holding film is formed on inner walls of the pores and made from another polymer material having hydrophobic properties. An electrolytic salt is held within the pores.

Growing community of inventors

Tokyo, Japan

Nobuaki Honda