Rigaku Industrial Corporation

Noboru Yamashita

Yoshiyuki Kataoka

Makoto Doi

Hisayuki Kohno

An X-ray fluorescence spectrometer for measuring the concentration of sulfur contained in a sample (S), by irradiating the sample (S) with primary X-rays from an X-ray tube (), monochromating fluorescent X-rays emitted from the sample (S) with a spectroscopic device, and detecting monochromated fluorescent X-rays with an X-ray detector. The spectrometer includes the X-ray tube () having a target with an element including chromium, an X-ray filter () disposed on a path of travel of X-rays between the X-ray tube () and the sample (S) and having a predetermined transmittance for Cr&#x2014;K&#x3b1; line from the X-ray tube () and made of a material which is an element of which absorption edges do not exist between energies of S&#x2014;K&#x3b1; line and Cr&#x2014;K&#x3b1; line, and a proportional counter () having a detector gas containing a neon gas or a helium gas.

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Takatsuki, Japan

Noboru Yamashita