Kurashiki Boseki Kabushiki Kaisha

Tokyo Electron Limited

Noboru Higashi

Akifumi Ikehata

Yukihiro Ozaki

Hideaki Sato

Hiromi Kiyose

Hiroshi Komiya

Satoru Hiraki

Naomi Kariyama

A substrate processing apparatus that performs processing by immersing a substrate into a processing liquid obtained by mixing phosphoric acid with a diluent includes a concentration sensing means for sensing the concentration of the processing liquid by measuring the absorbance characteristics of the processing liquid. The concentration sensing means includes a light-transmitting section that introduces the processing liquid into the inside to let the processing liquid pass therethrough, a light-emitting section that radiates light having a predetermined wavelength to the light-transmitting section, a light-receiving section that receives the light therefrom via the light-transmitting section, a first lens that condenses the light emitted from the light-emitting section to the light-transmitting section, a second lens that condenses the light that has passed through the light-transmitting section to the light-receiving section, and a cooling mechanism that cools at least one of these.

Substrate processing apparatus

In far ultraviolet spectroscopy using attenuated total reflection, total reflection light is measured by using evanescent waves of total reflection light. The penetration depth thereof is equal to or larger than 150 nm in a wavelength range in the far ultraviolet range wherein the penetration depth depends on a wavelength of the far ultraviolet light, refractive index of an object to be measured, refractive index of optical material of the probe and incident angle of the far ultraviolet light at an interface between the probe and the object. The attenuated total reflection probe is made of an optical material selected so as to have the penetration depth equal to or higher than 150 nm in far ultraviolet wavelength range, and the probe makes contact with the object to be measured at the interface, and the far ultraviolet light is incident on the interface at incident angle larger than critical angle in the wavelength range so as to have the penetration depth equal to or higher than 150 nm. The total reflection light from the interface is measured, and absorbance of the object to be measured is determined.

Method for attenuated total reflection far ultraviolet spectroscopy and an apparatus for measuring concentrations therewith

An optical probe consists of a first component made of a first optical material having a light transmission property in the far ultraviolet region, and a second component made of a second optical material arranged in contact with the surface of the first component. For example, the second optical material has a higher refractive index in the far ultraviolet region than the first optical material. The second component is provided, on a side in contact with a sample, with a surface totally reflecting light having incident angle equal to or larger than the critical angle. Alternatively, an optical probe has an optical material having a light transmission property in the far ultraviolet region, having a surface totally reflecting a ray of light of incident angle equal to or larger than the critical angle, at a side in contact with a sample, and the refractive index is higher near the surface than at the other parts in the far ultraviolet region. Consequently, a spectroscopic measurement becomes possible on very small solute components dissolved into water or the like in the far ultraviolet region.

Attenuated total reflection optical probe and apparatus therewith for spectroscopic measurement of aqueous solution

An attenuated total reflection probe has a prism and a supporter. The prism is made of an optical material which transmits light in far ultraviolet region, and has a contact plane to be in contact with a sample, and an incoming plane and an outgoing plane both not to be in contact with the sample. The supporter has an opening and is connected hermetically with the prism around the opening and eventually exposes the contact plane facing the opening. The contact plane, the incoming plane and the outgoing plane of the prism are formed such that light transmitting the incoming plane enters the contact plane at an incident angle larger than critical angle and that the light totally reflected by the contact plane goes out through the outgoing plane.

Attenuated total reflection probe and spectrometer therewith

An optical system for measuring an optical density of a sample in which homogeneity of light employed for measuring the density thereof is secured by including optical information upon a light source uniformly inside a measurement space about an optical axis therein even if the fluctuation occur in the light source in the system. A beam of light emitted from the light source and then focused on an interference filter is transformed into a parallel light through a collimator lens, and the parallel light is then split into two parallel pencils of light by an optical mask. The parallel light uniformly includes the optical information upon the light source. A reference cell is placed in a first split parallel pencil of light, and a sample cell is placed in a second split parallel pencil of light. The lights that have passed through the two cells are focused on an optical receiver by a focusing lens.

Growing community of inventors

Neyagawa, Japan

Noboru Higashi